William Frederick Bosch

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Edge ring assembly for improving feature profile tilting at extreme...
- Patent number 10,854,492
- Issue date Dec 1, 2020
- Lam Research Corporation
- William Frederick Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing equipment having improved particle perform...
- Patent number 7,802,539
- Issue date Sep 28, 2010
- Lam Research Corporation
- William Frederick Bosch
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Methods for minimizing mask undercuts and notches for plasma proces...
- Patent number 7,351,664
- Issue date Apr 1, 2008
- Lam Research Corporation
- Tamarak Pandhumsoporn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor processing equipment having improved particle perform...
- Patent number 6,890,861
- Issue date May 10, 2005
- Lam Research Corporation
- William Frederick Bosch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for etching vias in organosilicate glass materials without...
- Patent number 6,828,250
- Issue date Dec 7, 2004
- Lam Research Corporation
- Rao Annapragada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing equipment having improved particle perform...
- Patent number 6,506,254
- Issue date Jan 14, 2003
- Lam Research Corporation
- William Frederick Bosch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching of semiconductors
- Patent number 5,626,716
- Issue date May 6, 1997
- Lam Research Corporation
- William F. Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching of semiconductors
- Patent number 5,611,888
- Issue date Mar 18, 1997
- Lam Research Corporation
- William F. Bosch
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EDGE RING ASSEMBLY FOR IMPROVING FEATURE PROFILE TILTING AT EXTREME...
- Publication number 20170053820
- Publication date Feb 23, 2017
- LAM RESEARCH CORPORATION
- William Frederick Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR MINIMIZING MASK UNDERCUTS AND NOTCHES FOR PLASMA PROCES...
- Publication number 20070281489
- Publication date Dec 6, 2007
- Tamarak Pandhumsoporn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor processing equipment having improved particle perform...
- Publication number 20050181617
- Publication date Aug 18, 2005
- William Frederick Bosch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

William Frederick Bosch

Person

Patents Grantslast 30 patents

Edge ring assembly for improving feature profile tilting at extreme...

Semiconductor processing equipment having improved particle perform...

Methods for minimizing mask undercuts and notches for plasma proces...

Semiconductor processing equipment having improved particle perform...

Process for etching vias in organosilicate glass materials without...

Semiconductor processing equipment having improved particle perform...

Plasma etching of semiconductors

Plasma etching of semiconductors

Patents Applicationslast 30 patents

EDGE RING ASSEMBLY FOR IMPROVING FEATURE PROFILE TILTING AT EXTREME...

METHODS FOR MINIMIZING MASK UNDERCUTS AND NOTCHES FOR PLASMA PROCES...

Semiconductor processing equipment having improved particle perform...