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William Gray Callahan
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Rockport, MA, US
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last 30 patents
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Patent Grant
Ion beam current uniformity monitor, ion implanter and related method
Patent number
7,663,125
Issue date
Feb 16, 2010
Varian Semiconductor Equipment Associates, Inc.
William G. Callahan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Technique for uniformity tuning in an ion implanter system
Patent number
7,355,188
Issue date
Apr 8, 2008
Varian Semiconductor Equipment Associates, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
TUNING AN ION IMPLANTER FOR OPTIMAL PERFORMANCE
Publication number
20080245957
Publication date
Oct 9, 2008
Atul Gupta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM CURRENT UNIFORMITY MONITOR, ION IMPLANTER AND RELATED METHOD
Publication number
20080073584
Publication date
Mar 27, 2008
William G. Callahan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Technique for uniformity tuning in an ion implanter system
Publication number
20060284114
Publication date
Dec 21, 2006
Varian Semiconductor Equipment Associates, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS