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William H. Clopton
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National City, CA, US
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last 30 patents
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Patent Grant
Purge monitoring system for gas discharge laser
Patent number
6,504,860
Issue date
Jan 7, 2003
Cymer, Inc.
Peter C. Newman
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Purge monitoring system for gas discharge laser
Publication number
20020101903
Publication date
Aug 1, 2002
Peter C. Newman
H01 - BASIC ELECTRIC ELEMENTS