William Hunks

Person

Danbury, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cobalt deposition selectivity on copper and dielectrics
- Patent number 11,476,158
- Issue date Oct 18, 2022
- Entegris, Inc.
- Philip S. H. Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cyclopentadienyl titanium alkoxides with ozone activated ligands fo...
- Patent number 10,870,921
- Issue date Dec 22, 2020
- Entegris, Inc.
- Thomas M. Cameron
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Precursors for silicon dioxide gap fill
- Patent number 10,043,658
- Issue date Aug 7, 2018
- Entegris, Inc.
- William Hunks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine free tungsten ALD/CVD process
- Patent number 9,637,395
- Issue date May 2, 2017
- Entegris, Inc.
- Weimin Li
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Tellurium compounds useful for deposition of tellurium containing m...
- Patent number 9,537,095
- Issue date Jan 3, 2017
- Entegris, Inc.
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Doping of ZrO2 for DRAM applications
- Patent number 9,373,677
- Issue date Jun 21, 2016
- Entegris, Inc.
- Julie Cissell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursors for silicon dioxide gap fill
- Patent number 9,337,054
- Issue date May 10, 2016
- Entegris, Inc.
- William Hunks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster ion implantation of arsenic and phosphorus
- Patent number 9,269,582
- Issue date Feb 23, 2016
- Entegris, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antimony and germanium complexes useful for CVD/ALD of metal thin f...
- Patent number 9,219,232
- Issue date Dec 22, 2015
- Entegris, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimony compounds useful for deposition of antimony-containing mat...
- Patent number 9,034,688
- Issue date May 19, 2015
- Entegris, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of phase change memory materials
- Patent number 8,877,549
- Issue date Nov 4, 2014
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tellurium compounds useful for deposition of tellurium containing m...
- Patent number 8,796,068
- Issue date Aug 5, 2014
- Advanced Technology Materials, Inc.
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimony and germanium complexes useful for CVD/ALD of metal thin f...
- Patent number 8,709,863
- Issue date Apr 29, 2014
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of phase change memory materials
- Patent number 8,679,894
- Issue date Mar 25, 2014
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimony compounds useful for deposition of antimony-containing mat...
- Patent number 8,674,127
- Issue date Mar 18, 2014
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of phase change memory materials
- Patent number 8,288,198
- Issue date Oct 16, 2012
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimony and germanium complexes useful for CVD/ALD of metal thin f...
- Patent number 8,268,665
- Issue date Sep 18, 2012
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous Ge/Te deposition process
- Patent number 8,093,140
- Issue date Jan 10, 2012
- Advanced Technology Materials, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Super-dry reagent compositions for formation of ultra low k films
- Patent number 8,053,375
- Issue date Nov 8, 2011
- Advanced Technology Materials, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimony and germanium complexes useful for CVD/ALD of metal thin f...
- Patent number 8,008,117
- Issue date Aug 30, 2011
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimony and germanium complexes useful for CVD/ALD of metal thin f...
- Patent number 7,838,329
- Issue date Nov 23, 2010
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COBALT DEPOSITION SELECTIVITY ON COPPER AND DIELECTRICS
- Publication number 20180130706
- Publication date May 10, 2018
- Entegris, Inc.
- Philip S.H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS FOR SILICON DIOXIDE GAP FILL
- Publication number 20180130654
- Publication date May 10, 2018
- Entegris, Inc.
- William Hunks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AMINE CATALYSTS FOR LOW TEMPERATURE ALD/CVD SiO2 DEPOSITION USING H...
- Publication number 20170103888
- Publication date Apr 13, 2017
- Entegris, Inc.
- Dingkai Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLOPENTADIENYL TITANIUM ALKOXIDES WITH OZONE ACTIVATED LIGANDS FO...
- Publication number 20160362790
- Publication date Dec 15, 2016
- Entegris, Inc.
- Thomas M. Cameron
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPING OF ZrO2 FOR DRAM APPLICATIONS
- Publication number 20160343795
- Publication date Nov 24, 2016
- Entegris, Inc.
- Julie Cissell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS FOR SILICON DIOXIDE GAP FILL
- Publication number 20160225615
- Publication date Aug 4, 2016
- Entegris, Inc.
- William Hunks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUORINE FREE TUNGSTEN ALD/CVD PROCESS
- Publication number 20150251920
- Publication date Sep 10, 2015
- Entegris, Inc.
- Weimin Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...
- Publication number 20140329357
- Publication date Nov 6, 2014
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...
- Publication number 20140220733
- Publication date Aug 7, 2014
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS
- Publication number 20140206134
- Publication date Jul 24, 2014
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MAT...
- Publication number 20140206136
- Publication date Jul 24, 2014
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLUSTER ION IMPLANTATION OF ARSENIC AND PHOSPHORUS
- Publication number 20140011346
- Publication date Jan 9, 2014
- Advanced Technology Materials, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...
- Publication number 20130288462
- Publication date Oct 31, 2013
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPING OF ZrO2 FOR DRAM APPLICATIONS
- Publication number 20130122722
- Publication date May 16, 2013
- Advanced Technology Materials, Inc.
- Julie Cissell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...
- Publication number 20130029456
- Publication date Jan 31, 2013
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS
- Publication number 20130005078
- Publication date Jan 3, 2013
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ZIRCONIUM, HAFNIUM AND TITANIUM PRECURSORS FOR ATOMIC LAYER DEPOSIT...
- Publication number 20120196449
- Publication date Aug 2, 2012
- Advanced Technology Materials, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS GE/TE DEPOSITION PROCESS
- Publication number 20120108038
- Publication date May 3, 2012
- Advanced Technology Materials, Inc.
- Philip S.H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...
- Publication number 20110263100
- Publication date Oct 27, 2011
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MAT...
- Publication number 20110111556
- Publication date May 12, 2011
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...
- Publication number 20100317150
- Publication date Dec 16, 2010
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOVEL BISMUTH PRECURSORS FOR CVD/ALD OF THIN FILMS
- Publication number 20100279011
- Publication date Nov 4, 2010
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PRECURSORS FOR SILICON DIOXIDE GAP FILL
- Publication number 20100164057
- Publication date Jul 1, 2010
- Advanced Technology Materials, Inc.
- William Hunks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...
- Publication number 20090305458
- Publication date Dec 10, 2009
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BICYCLIC GUANIDINATES AND BRIDGING DIAMIDES AS CVD/ALD PRECURSORS
- Publication number 20090275164
- Publication date Nov 5, 2009
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...
- Publication number 20090215225
- Publication date Aug 27, 2009
- Advanced Technology Materials, Inc.
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS
- Publication number 20090124039
- Publication date May 14, 2009
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS GE/TE DEPOSITION PROCESS
- Publication number 20090112009
- Publication date Apr 30, 2009
- Advanced Technology Materials, Inc.
- Philip S.H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL AND METALLOID SILYLAMIDES, KETIMATES, TETRAALKYLGUANIDINATES...
- Publication number 20090087561
- Publication date Apr 2, 2009
- Advanced Technology Materials, Inc.
- Tianniu CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

William Hunks

Person

Patents Grantslast 30 patents

Cobalt deposition selectivity on copper and dielectrics

Cyclopentadienyl titanium alkoxides with ozone activated ligands fo...

Precursors for silicon dioxide gap fill

Fluorine free tungsten ALD/CVD process

Tellurium compounds useful for deposition of tellurium containing m...

Doping of ZrO2 for DRAM applications

Precursors for silicon dioxide gap fill

Cluster ion implantation of arsenic and phosphorus

Antimony and germanium complexes useful for CVD/ALD of metal thin f...

Antimony compounds useful for deposition of antimony-containing mat...

Low temperature deposition of phase change memory materials

Tellurium compounds useful for deposition of tellurium containing m...

Antimony and germanium complexes useful for CVD/ALD of metal thin f...

Low temperature deposition of phase change memory materials

Antimony compounds useful for deposition of antimony-containing mat...

Low temperature deposition of phase change memory materials

Antimony and germanium complexes useful for CVD/ALD of metal thin f...

Amorphous Ge/Te deposition process

Super-dry reagent compositions for formation of ultra low k films

Antimony and germanium complexes useful for CVD/ALD of metal thin f...

Antimony and germanium complexes useful for CVD/ALD of metal thin f...

Patents Applicationslast 30 patents

COBALT DEPOSITION SELECTIVITY ON COPPER AND DIELECTRICS

PRECURSORS FOR SILICON DIOXIDE GAP FILL

AMINE CATALYSTS FOR LOW TEMPERATURE ALD/CVD SiO2 DEPOSITION USING H...

CYCLOPENTADIENYL TITANIUM ALKOXIDES WITH OZONE ACTIVATED LIGANDS FO...

DOPING OF ZrO2 FOR DRAM APPLICATIONS

PRECURSORS FOR SILICON DIOXIDE GAP FILL

FLUORINE FREE TUNGSTEN ALD/CVD PROCESS

TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...

ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...

LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS

ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MAT...

CLUSTER ION IMPLANTATION OF ARSENIC AND PHOSPHORUS

TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...

DOPING OF ZrO2 FOR DRAM APPLICATIONS

ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...

LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS

ZIRCONIUM, HAFNIUM AND TITANIUM PRECURSORS FOR ATOMIC LAYER DEPOSIT...

AMORPHOUS GE/TE DEPOSITION PROCESS

ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...

ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MAT...

ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...

NOVEL BISMUTH PRECURSORS FOR CVD/ALD OF THIN FILMS

PRECURSORS FOR SILICON DIOXIDE GAP FILL

ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...

BICYCLIC GUANIDINATES AND BRIDGING DIAMIDES AS CVD/ALD PRECURSORS

TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...

LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS

AMORPHOUS GE/TE DEPOSITION PROCESS

METAL AND METALLOID SILYLAMIDES, KETIMATES, TETRAALKYLGUANIDINATES...