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William K. Loizides
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Hollis, NH, US
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Patents Grants
last 30 patents
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Patent Grant
In-situ monitoring on an ion implanter
Patent number
7,078,712
Issue date
Jul 18, 2006
Axcelis Technologies, Inc.
Alexander S. Perel
G01 - MEASURING TESTING
Information
Patent Grant
Decaborane ion source
Patent number
6,958,481
Issue date
Oct 25, 2005
Axcelis Technologies, Inc.
Thomas N. Horsky
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Decaborane ionizer
Patent number
6,288,403
Issue date
Sep 11, 2001
Axcelis Technologies, Inc.
Thomas N. Horsky
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
In-situ monitoring on an ion implanter
Publication number
20050205807
Publication date
Sep 22, 2005
Alexander S. Perel
G01 - MEASURING TESTING
Information
Patent Application
Decaborane ion source
Publication number
20010054699
Publication date
Dec 27, 2001
Thomas N. Horsky
H01 - BASIC ELECTRIC ELEMENTS