William M. Denty JR.

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for verifying gas flow rates from a gas supply system into...
- Patent number 9,234,775
- Issue date Jan 12, 2016
- Lam Research Corporation
- Dean J. Larson
- G05 - CONTROLLING REGULATING
Information Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
- Patent number 9,093,483
- Issue date Jul 28, 2015
- Lam Research Corporation
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Uniform etch system
- Patent number 8,801,892
- Issue date Aug 12, 2014
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Upper electrode backing member with particle reducing features
- Patent number 8,709,202
- Issue date Apr 29, 2014
- Lam Research Corporation
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
- Patent number 8,702,866
- Issue date Apr 22, 2014
- Lam Research Corporation
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning fixtures and methods of cleaning electrode assembly plenums
- Patent number 7,736,441
- Issue date Jun 15, 2010
- Lam Research Corporation
- Duane Outka
- B08 - CLEANING
Information Patent Grant
Multiple zone gas distribution apparatus for thermal control of sem...
- Patent number 7,156,951
- Issue date Jan 2, 2007
- Lam Research Corporation
- Qinghong K. Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber liner for semiconductor process chambers
- Patent number 6,277,237
- Issue date Aug 21, 2001
- Lam Research Corporation
- Alan M. Schoepp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber liner for semiconductor process chambers
- Patent number 6,170,429
- Issue date Jan 9, 2001
- Lam Research Corporation
- Alan M. Schoepp
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTEND...
- Publication number 20140187049
- Publication date Jul 3, 2014
- LAM RESEARCH CORPORATION
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR VERIFYING GAS FLOW RATES FROM A GAS SUPPLY SYSTEM INTO...
- Publication number 20140033828
- Publication date Feb 6, 2014
- LAM RESEARCH CORPORATION
- Dean J. Larson
- G01 - MEASURING TESTING
Information Patent Application
CLEANING FIXTURES AND METHODS OF CLEANING ELECTRODE ASSEMBLY PLENUMS
- Publication number 20090090393
- Publication date Apr 9, 2009
- LAM RESEARCH CORPORATION
- Duane Outka
- B08 - CLEANING
Information Patent Application
UNIFORM ETCH SYSTEM
- Publication number 20080210377
- Publication date Sep 4, 2008
- LAM RESEARCH CORPORATION
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Showerhead electrode assembly with gas flow modification for extend...
- Publication number 20080141941
- Publication date Jun 19, 2008
- LAM RESEARCH CORPORATION
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Upper electrode backing member with particle reducing features
- Publication number 20080090417
- Publication date Apr 17, 2008
- LAM RESEARCH CORPORATION
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for verifying gas flow rates from a gas supply system into...
- Publication number 20070021935
- Publication date Jan 25, 2007
- Dean J. Larson
- G05 - CONTROLLING REGULATING
Information Patent Application
Uniform etch system
- Publication number 20040112540
- Publication date Jun 17, 2004
- Lam Research Corporation
- Dean J. Larson
- G05 - CONTROLLING REGULATING
Information Patent Application
Gas distribution system with tuning gas
- Publication number 20040112538
- Publication date Jun 17, 2004
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Uniform etch system
- Publication number 20040112539
- Publication date Jun 17, 2004
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS

William M. Denty JR.

Person

Patents Grantslast 30 patents

Methods for verifying gas flow rates from a gas supply system into...

Showerhead electrode assembly with gas flow modification for extend...

Uniform etch system

Upper electrode backing member with particle reducing features

Showerhead electrode assembly with gas flow modification for extend...

Cleaning fixtures and methods of cleaning electrode assembly plenums

Multiple zone gas distribution apparatus for thermal control of sem...

Chamber liner for semiconductor process chambers

Chamber liner for semiconductor process chambers

Patents Applicationslast 30 patents

SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTEND...

METHODS FOR VERIFYING GAS FLOW RATES FROM A GAS SUPPLY SYSTEM INTO...

CLEANING FIXTURES AND METHODS OF CLEANING ELECTRODE ASSEMBLY PLENUMS

UNIFORM ETCH SYSTEM

Showerhead electrode assembly with gas flow modification for extend...

Upper electrode backing member with particle reducing features

Methods for verifying gas flow rates from a gas supply system into...

Uniform etch system

Gas distribution system with tuning gas

Uniform etch system