William M. Holber

Follow

Person

Gloucester, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
In-situ plasma cleaning of process chamber components
- Patent number 11,495,434
- Issue date Nov 8, 2022
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING
Information Patent Grant
In-situ plasma cleaning of process chamber components
- Patent number 11,037,758
- Issue date Jun 15, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING
Information Patent Grant
In-situ plasma cleaning of process chamber components
- Patent number 10,522,330
- Issue date Dec 31, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS
- Publication number 20210013001
- Publication date Jan 14, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING
Information Patent Application
IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS
- Publication number 20200126757
- Publication date Apr 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING
Information Patent Application
IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS
- Publication number 20160365225
- Publication date Dec 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING