William M. LU

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Protection of aluminum process chamber components
- Patent number 11,810,766
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Karthikeyan Balaraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polishing jig assembly for a new or refurbished electrostatic chuck
- Patent number 11,648,639
- Issue date May 16, 2023
- Applied Materials, Inc.
- William Ming-ye Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of polishing a new or a refurbished electrostatic chuck
- Patent number 11,260,498
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- William Ming-ye Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pre-conditioned chamber components
- Patent number 11,072,852
- Issue date Jul 27, 2021
- Applied Materials, Inc.
- Brian T. West
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
30 nm in-line LPC testing and cleaning of semiconductor processing...
- Patent number 10,583,465
- Issue date Mar 10, 2020
- Applied Materials, Inc.
- Jianqi Wang
- B08 - CLEANING
Information Patent Grant
Geometries and patterns for surface texturing to increase depositio...
- Patent number 9,101,954
- Issue date Aug 11, 2015
- Applied Materials, Inc.
- Jianqi Wang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Electrostatic chuck AlN dielectric repair
- Patent number 9,001,489
- Issue date Apr 7, 2015
- Applied Materials, Inc.
- Wendell G. Boyd
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Polishing jig assembley for a new or refurbished electrostatic chuck
- Publication number 20220088743
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- William Ming-ye LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE-CONDITIONED CHAMBER COMPONENTS
- Publication number 20200024725
- Publication date Jan 23, 2020
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTION OF ALUMINUM PROCESS CHAMBER COMPONENTS
- Publication number 20200013589
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Karthikeyan BALARAMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
30 NM IN-LINE LPC TESTING AND CLEANING OF SEMICONDUCTOR PROCESSING...
- Publication number 20170299487
- Publication date Oct 19, 2017
- Applied Materials, Inc.
- Jianqi WANG
- B08 - CLEANING
Information Patent Application
PRE-COATED SHIELD USING IN VHF-RF PVD CHAMBERS
- Publication number 20170145553
- Publication date May 25, 2017
- Applied Materials, Inc.
- Zhendong LIU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
GEOMETRIES AND PATTERNS FOR SURFACE TEXTURING TO INCREASE DEPOSITIO...
- Publication number 20150079336
- Publication date Mar 19, 2015
- Applied Materials, Inc.
- Jianqi WANG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF POLISHING A NEW OR A REFURBISHED ELECTROSTATIC CHUCK
- Publication number 20150044947
- Publication date Feb 12, 2015
- Applied Materials, Inc.
- William Ming-Ye LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK ALN DIELECTRIC REPAIR
- Publication number 20120307412
- Publication date Dec 6, 2012
- Applied Materials, Inc.
- Wendell G. Boyd, JR.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REFURBISHING GAS DISTRIBUTION PLATE SURFACES
- Publication number 20120255635
- Publication date Oct 11, 2012
- Applied Materials, Inc.
- Sumanth BANDA
- B08 - CLEANING

William M. LU

Person

Patents Grantslast 30 patents

Protection of aluminum process chamber components

Polishing jig assembly for a new or refurbished electrostatic chuck

Method of polishing a new or a refurbished electrostatic chuck

Pre-conditioned chamber components

30 nm in-line LPC testing and cleaning of semiconductor processing...

Geometries and patterns for surface texturing to increase depositio...

Electrostatic chuck AlN dielectric repair

Patents Applicationslast 30 patents

Polishing jig assembley for a new or refurbished electrostatic chuck

PRE-CONDITIONED CHAMBER COMPONENTS

PROTECTION OF ALUMINUM PROCESS CHAMBER COMPONENTS

30 NM IN-LINE LPC TESTING AND CLEANING OF SEMICONDUCTOR PROCESSING...

PRE-COATED SHIELD USING IN VHF-RF PVD CHAMBERS

GEOMETRIES AND PATTERNS FOR SURFACE TEXTURING TO INCREASE DEPOSITIO...

METHOD OF POLISHING A NEW OR A REFURBISHED ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK ALN DIELECTRIC REPAIR

METHOD AND APPARATUS FOR REFURBISHING GAS DISTRIBUTION PLATE SURFACES