William N. Partio

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet light source
- Patent number 7,642,533
- Issue date Jan 5, 2010
- Cymer, Inc.
- William N. Partio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Collector for EUV light source
- Patent number 7,288,778
- Issue date Oct 30, 2007
- Cymer, Inc.
- William N. Partio
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Laser thin film poly-silicon annealing optical system
- Patent number 7,009,140
- Issue date Mar 7, 2006
- Cymer, Inc.
- William N. Partio
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High power deep ultraviolet laser with long life optics
- Patent number 6,904,073
- Issue date Jun 7, 2005
- Cymer, Inc.
- Thomas A. Yager
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser having baffled enclosure
- Patent number 6,021,150
- Issue date Feb 1, 2000
- Cymer, Inc.
- William N. Partio
- F28 - HEAT EXCHANGE IN GENERAL