William N. Partlo

Follow

Person

Fairport, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Variable annular illuminator for photolithographic projection imager
- Patent number 5,757,470
- Issue date May 26, 1998
- General Signal Corporation
- Paul G. Dewa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Variable annular illuminator for photolithographic projection imager
- Patent number 5,452,054
- Issue date Sep 19, 1995
- General Signal Corporation
- Paul G. Dewa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Partial coherence varier for microlithographic system
- Patent number 5,383,000
- Issue date Jan 17, 1995
- General Signal Corporation
- Paul F. Michaloski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY