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William P. Inhofer
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Plymouth, MN, US
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Patents Grants
last 30 patents
Information
Patent Grant
Magnetic integrated lift pin system for a chemical processing chamber
Patent number
11,545,387
Issue date
Jan 3, 2023
TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
William Inhofer
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Magnetically levitated and rotated chuck for processing microelectr...
Patent number
10,910,253
Issue date
Feb 2, 2021
TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
William P. Inhofer
B08 - CLEANING
Information
Patent Grant
Systems and methods for metering a dose volume of fluid used to tre...
Patent number
9,982,664
Issue date
May 29, 2018
Tel FSI, Inc.
William P. Inhofer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Processing system and method for providing a heated etching solution
Patent number
9,911,631
Issue date
Mar 6, 2018
Tel FSI, Inc.
Kevin L Siefering
G05 - CONTROLLING REGULATING
Information
Patent Grant
Processing system and method for providing a heated etching solution
Patent number
9,831,107
Issue date
Nov 28, 2017
Tel FSI, Inc.
Kevin L Siefering
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for transferring a microelectronic device to and from a proc...
Patent number
6,251,195
Issue date
Jun 26, 2001
FSI International, Inc.
Thomas J. Wagener
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Magnetic Integrated Lift Pin System for a Chemical Processing Chamber
Publication number
20200020566
Publication date
Jan 16, 2020
TEL FSI, Inc.
William Inhofer
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
MAGNETICALLY LEVITATED AND ROTATED CHUCK FOR PROCESSING MICROELECTR...
Publication number
20180130694
Publication date
May 10, 2018
TEL FSI, Inc.
William P. Inhofer
B08 - CLEANING
Information
Patent Application
Systems & Methods for Metering a Dose Volume of Fluid used to Treat...
Publication number
20170028418
Publication date
Feb 2, 2017
TEL FSI, Inc.
William P. Inhofer
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Processing System and Method for Providing a Heated Etching Solution
Publication number
20140277682
Publication date
Sep 18, 2014
TEL FSI, Inc.
Kevin L. Siefering
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Processing System and Method for Providing a Heated Etching Solution
Publication number
20140264153
Publication date
Sep 18, 2014
TEL FSI, Inc.
Kevin L. Siefering
H01 - BASIC ELECTRIC ELEMENTS