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Contamination trap
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Patent number 11,982,947
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Issue date May 14, 2024
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ASML NETHERLAND B.V.
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Sander Catharina Reinier Derks
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Contamination trap
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Patent number 11,556,067
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Issue date Jan 17, 2023
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ASML Netherlands B.V.
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Sander Catharina Reinier Derks
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Lithographic apparatus
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Patent number 9,696,638
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Issue date Jul 4, 2017
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ASML Netherlands B.V.
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Engelbertus Antonius Fransiscus Van Der Pasch
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Lithographic apparatus
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Patent number 9,229,340
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Issue date Jan 5, 2016
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ASML Netherlands B.V.
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Engelbertus Antonius Fransiscus Van Der Pasch
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Lithographic apparatus
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Patent number 8,570,492
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Issue date Oct 29, 2013
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ASML Netherlands B.V.
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Engelbertus Antonius Fransiscus Van Der Pasch
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY