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William R. Bartlett
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Los Gatos, CA, US
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last 30 patents
Information
Patent Grant
Driving a carrier head in a wafer polishing system
Patent number
6,506,099
Issue date
Jan 14, 2003
Applied Materials, Inc.
William R. Bartlett
B24 - GRINDING POLISHING
Information
Patent Grant
Drive system for a carrier head support structure
Patent number
6,350,188
Issue date
Feb 26, 2002
Applied Materials, Inc.
William Bartlett
B24 - GRINDING POLISHING
Information
Patent Grant
Circumferentially oscillating carousel apparatus for sequentially p...
Patent number
6,245,680
Issue date
Jun 12, 2001
Applied Materials, Inc.
Norm Shendon
B24 - GRINDING POLISHING
Information
Patent Grant
Circumferentially oscillating carousel apparatus for sequentially p...
Patent number
6,136,715
Issue date
Oct 24, 2000
Applied Materials, Inc.
Norm Shendon
B24 - GRINDING POLISHING
Information
Patent Grant
Circumferentially oscillating carousel apparatus for sequentially p...
Patent number
5,951,373
Issue date
Sep 14, 1999
Applied Materials, Inc.
Norm Shendon
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for removing a substrate from a polishing pad...
Patent number
5,899,801
Issue date
May 4, 1999
Applied Materials, Inc.
Robert D. Tolles
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for conditioning a chemical mechanical polishi...
Patent number
5,775,983
Issue date
Jul 7, 1998
Applied Materials, Inc.
Norman Shendon
B24 - GRINDING POLISHING