William R. Entley

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for endpointing CVD chamber cleans following ultra low-k fil...
- Patent number 7,479,191
- Issue date Jan 20, 2009
- Novellus Systems, Inc.
- William R. Entley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ plasma process to remove fluorine residues from the interio...
- Patent number 6,872,323
- Issue date Mar 29, 2005
- Novellus Systems, Inc.
- William R. Entley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...