William R. Wheeler

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer edge inspection
- Patent number 7,532,318
- Issue date May 12, 2009
- KLA-Tencor Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
System for sensing a sample
- Patent number 7,278,301
- Issue date Oct 9, 2007
- KLA-Tencor Corporation
- Thomas McWaid
- G01 - MEASURING TESTING
Information Patent Grant
Wafer edge inspection
- Patent number 7,161,667
- Issue date Jan 9, 2007
- KLA-Tencor Technologies Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Wafer edge inspection
- Patent number 7,161,668
- Issue date Jan 9, 2007
- KLA-Tencor Technologies Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Dual stage instrument for scanning a specimen
- Patent number 7,100,430
- Issue date Sep 5, 2006
- KLA-Tencor Corporation
- Amin Samsavar
- G01 - MEASURING TESTING
Information Patent Grant
System for sensing a sample
- Patent number 6,931,917
- Issue date Aug 23, 2005
- KLA-Tencor Corporation
- Thomas McWaid
- G01 - MEASURING TESTING
Information Patent Grant
System for sensing a sample
- Patent number 6,520,005
- Issue date Feb 18, 2003
- KLA-Tencor Corporation
- Thomas McWaid
- G01 - MEASURING TESTING
Information Patent Grant
Dual stage instrument for scanning a specimen
- Patent number 6,267,005
- Issue date Jul 31, 2001
- KLA-Tencor Corporation
- Amin Samsavar
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Dual stage instrument for scanning a specimen
- Patent number 5,948,972
- Issue date Sep 7, 1999
- KLA-Tencor Corporation
- Amin Samsavar
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Constant-force profilometer with stylus-stabilizing sensor assembly...
- Patent number 5,705,741
- Issue date Jan 6, 1998
- Tencor Instruments
- Steven G. Eaton
- G01 - MEASURING TESTING
Information Patent Grant
Profilometer stylus assembly insensitive to vibration
- Patent number 5,309,755
- Issue date May 10, 1994
- Tencor Instruments
- William R. Wheeler
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for heating and cooling articles
- Patent number 4,609,037
- Issue date Sep 2, 1986
- Tencor Instruments
- William R. Wheeler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer handling apparatus
- Patent number 4,597,708
- Issue date Jul 1, 1986
- Tencor Instruments
- William R. Wheeler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer chuck with wafer cleaning feature
- Patent number 4,433,835
- Issue date Feb 28, 1984
- Tencor Instruments
- William R. Wheeler
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Metrology instrument for measuring vertical profiles of integrated...
- Patent number 4,391,044
- Issue date Jul 5, 1983
- Tencor Instruments
- William R. Wheeler
- G01 - MEASURING TESTING
Information Patent Grant
Wafer orientation system
- Patent number 4,376,482
- Issue date Mar 15, 1983
- Tencor Instruments
- William R. Wheeler
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Non-contacting resistivity instrument with structurally related con...
- Patent number 4,302,721
- Issue date Nov 24, 1981
- Tencor Instruments
- Karel Urbanek
- G01 - MEASURING TESTING
Information Patent Grant
Probe for determining p or n-type conductivity of semiconductor mat...
- Patent number 4,282,483
- Issue date Aug 4, 1981
- Tencor Instruments
- George J. Kren
- G01 - MEASURING TESTING
Information Patent Grant
Acoustic method and apparatus for measuring surfaces of wafers and...
- Patent number 4,280,354
- Issue date Jul 28, 1981
- Tencor Instruments
- William R. Wheeler
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Grant
Gauge for measuring distance to planar surfaces and thicknesses of...
- Patent number 4,175,441
- Issue date Nov 27, 1979
- Tencor Instruments
- Karel Urbanek
- G01 - MEASURING TESTING
Information Patent Grant
Metrology instrument for measuring vertical profiles of integrated...
- Patent number 4,103,542
- Issue date Aug 1, 1978
- Tencor Instruments
- William R. Wheeler
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
WAFER EDGE INSPECTION
- Publication number 20070127016
- Publication date Jun 7, 2007
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
Wafer edge inspection
- Publication number 20060250609
- Publication date Nov 9, 2006
- KLA-Tencor Technologies Corp.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
Wafer edge inspection
- Publication number 20060250610
- Publication date Nov 9, 2006
- KLA-Tencor Technologies Corp.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
System for Sensing a Sample
- Publication number 20060230819
- Publication date Oct 19, 2006
- KLA-Tencor Corporation
- Thomas McWaid
- G01 - MEASURING TESTING
Information Patent Application
System for Sensing a Sample
- Publication number 20060207318
- Publication date Sep 21, 2006
- KLA-Tencor Corporation
- Thomas McWaid
- G01 - MEASURING TESTING
Information Patent Application
System for sensing a sample
- Publication number 20050262931
- Publication date Dec 1, 2005
- Thomas McWaid
- G01 - MEASURING TESTING
Information Patent Application
Dual stage instrument for scanning a specimen
- Publication number 20050005688
- Publication date Jan 13, 2005
- Amin Samsavar
- G01 - MEASURING TESTING
Information Patent Application
System for sensing a sample
- Publication number 20040118193
- Publication date Jun 24, 2004
- Thomas McWaid
- G01 - MEASURING TESTING
Information Patent Application
Dual stage instrument for scanning a specimen
- Publication number 20030089162
- Publication date May 15, 2003
- Amin Samsavar
- G01 - MEASURING TESTING
Information Patent Application
System for sensing a sample
- Publication number 20030089163
- Publication date May 15, 2003
- Thomas McWaid
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR SENSING A SAMPLE
- Publication number 20020174714
- Publication date Nov 28, 2002
- THOMAS MCWAID
- B82 - NANO-TECHNOLOGY
Information Patent Application
Dual stage instrument for scanning a specimen
- Publication number 20010047682
- Publication date Dec 6, 2001
- Amin Samsavar
- B82 - NANO-TECHNOLOGY

William R. Wheeler

Person

Patents Grantslast 30 patents

Wafer edge inspection

System for sensing a sample

Wafer edge inspection

Wafer edge inspection

Dual stage instrument for scanning a specimen

System for sensing a sample

System for sensing a sample

Dual stage instrument for scanning a specimen

Dual stage instrument for scanning a specimen

Constant-force profilometer with stylus-stabilizing sensor assembly...

Profilometer stylus assembly insensitive to vibration

Apparatus for heating and cooling articles

Wafer handling apparatus

Wafer chuck with wafer cleaning feature

Metrology instrument for measuring vertical profiles of integrated...

Wafer orientation system

Non-contacting resistivity instrument with structurally related con...

Probe for determining p or n-type conductivity of semiconductor mat...

Acoustic method and apparatus for measuring surfaces of wafers and...

Gauge for measuring distance to planar surfaces and thicknesses of...

Metrology instrument for measuring vertical profiles of integrated...

Patents Applicationslast 30 patents

WAFER EDGE INSPECTION

Wafer edge inspection

Wafer edge inspection

System for Sensing a Sample

System for Sensing a Sample

System for sensing a sample

Dual stage instrument for scanning a specimen

System for sensing a sample

Dual stage instrument for scanning a specimen

System for sensing a sample

SYSTEM FOR SENSING A SAMPLE

Dual stage instrument for scanning a specimen