William Roberts

Person

Mechanicsville, VA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for automated beam optimization in a scanning...
- Patent number 7,358,493
- Issue date Apr 15, 2008
- Infineon Technologies Richmond, LP
- William Roberts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimizing light path uniformity in inspection systems
- Patent number 7,248,351
- Issue date Jul 24, 2007
- Infineon Technologies AG
- William Roberts
- G01 - MEASURING TESTING
Information Patent Grant
Lithography method and system with correction of overlay offset err...
- Patent number 7,184,853
- Issue date Feb 27, 2007
- Infineon Technologies Richmond, LP
- William Roberts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for minimizing multi-layer microscopic and macros...
- Patent number 6,881,592
- Issue date Apr 19, 2005
- Infineon Technologies Richmond, LP
- William Roberts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anti-reflective coating conformality control
- Patent number 6,852,473
- Issue date Feb 8, 2005
- Infineon Technologies Richmond, LP
- William Roberts
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
System and method for controlling a semiconductor manufacturing pro...
- Publication number 20090215206
- Publication date Aug 27, 2009
- QIMONDA NORTH AMERICA CORP.
- Abeer Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for automated beam optimization in a scanning...
- Publication number 20060278826
- Publication date Dec 14, 2006
- William Roberts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithography method and system with correction of overlay offset err...
- Publication number 20060265097
- Publication date Nov 23, 2006
- William Roberts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optimizing focal plane fitting functions for an image field on a su...
- Publication number 20060192943
- Publication date Aug 31, 2006
- William Roberts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Automated focus feedback for optical lithography tool
- Publication number 20060192931
- Publication date Aug 31, 2006
- William Roberts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for analyzing images of blazed phase grating samples
- Publication number 20060193531
- Publication date Aug 31, 2006
- William Roberts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Run to run control for lens aberrations
- Publication number 20060194130
- Publication date Aug 31, 2006
- William Roberts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optimizing light path uniformity in inspection systems
- Publication number 20060192947
- Publication date Aug 31, 2006
- William Roberts
- G01 - MEASURING TESTING
Information Patent Application
Optimizing focal plane fitting functions for an image field on a su...
- Publication number 20060193532
- Publication date Aug 31, 2006
- William Roberts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and device for minimizing multi-layer microscopic and macros...
- Publication number 20040072447
- Publication date Apr 15, 2004
- William Roberts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Anti-reflective coating conformality control
- Publication number 20040058278
- Publication date Mar 25, 2004
- Infineon Technologies Richmond, LP
- William Roberts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Anti-reflective coating conformality control
- Publication number 20020015910
- Publication date Feb 7, 2002
- William Roberts
- H01 - BASIC ELECTRIC ELEMENTS

William Roberts

Person

Patents Grantslast 30 patents

Method and apparatus for automated beam optimization in a scanning...

Optimizing light path uniformity in inspection systems

Lithography method and system with correction of overlay offset err...

Method and device for minimizing multi-layer microscopic and macros...

Anti-reflective coating conformality control

Patents Applicationslast 30 patents

System and method for controlling a semiconductor manufacturing pro...

Method and apparatus for automated beam optimization in a scanning...

Lithography method and system with correction of overlay offset err...

Optimizing focal plane fitting functions for an image field on a su...

Automated focus feedback for optical lithography tool

System for analyzing images of blazed phase grating samples

Run to run control for lens aberrations

Optimizing light path uniformity in inspection systems

Optimizing focal plane fitting functions for an image field on a su...

Method and device for minimizing multi-layer microscopic and macros...

Anti-reflective coating conformality control

Anti-reflective coating conformality control