William Schumaker

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Laser produced plasma illuminator with liquid sheet jet target
- Patent number 11,259,394
- Issue date Feb 22, 2022
- KLA Corporation
- Chao Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for pumping laser sustained plasma with interlace...
- Patent number 11,121,521
- Issue date Sep 14, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
POLARIZATION-MULTIPLEXED RADIATOR SYSTEM, LIGHT SOURCE SYSTEM, AND...
- Publication number 20240121876
- Publication date Apr 11, 2024
- Erik Robert Hosler
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser Produced Plasma Illuminator With Liquid Sheet Jet Target
- Publication number 20210136901
- Publication date May 6, 2021
- KLA Corporation
- Chao Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and Method for Pumping Laser Sustained Plasma with Interlace...
- Publication number 20200274314
- Publication date Aug 27, 2020
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS