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William T. Hart
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Castro Valley, CA, US
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last 30 patents
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Patent Grant
UV lamp assembly of degas chamber having rotary shutters
Patent number
8,584,612
Issue date
Nov 19, 2013
Lam Research Corporation
William T. Hart
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Metrology Enclosure Including Spectral Reflectometry System for Pla...
Publication number
20240395519
Publication date
Nov 28, 2024
LAM RESEARCH CORPORATION
Alexander Miller Paterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UV LAMP ASSEMBLY OF DEGAS CHAMBER HAVING ROTARY SHUTTERS
Publication number
20110146705
Publication date
Jun 23, 2011
LAM RESEARCH CORPORATION
William T. Hart
H01 - BASIC ELECTRIC ELEMENTS