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Winfried Waldvogel
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Kirchentellinsfurt, DE
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last 30 patents
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Patent Grant
Micromechanical sensor and method for the manufacture thereof
Patent number
6,318,175
Issue date
Nov 20, 2001
Robert Bosch GmbH
Joerg Muchow
G01 - MEASURING TESTING
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Patent Grant
Micromechanical sensor including a single-crystal silicon support
Patent number
6,076,404
Issue date
Jun 20, 2000
Robert Bosch GmbH
Joerg Muchow
G01 - MEASURING TESTING
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Patent Grant
Method of fabricating a micromechanical sensor
Patent number
5,616,514
Issue date
Apr 1, 1997
Robert Bosch GmbH
Joerg Muchow
G01 - MEASURING TESTING