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Wolfgang Engl
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Erlangen, DE
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last 30 patents
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Patent Grant
Micro-mechanical component with cantilever integrated electrical fu...
Patent number
8,810,110
Issue date
Aug 19, 2014
Nanoworld AG
Thomas Sulzbach
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MICRO-MECHANICAL COMPONENT WITH CANTILEVER INTEGRATED ELECTRICAL FU...
Publication number
20120242189
Publication date
Sep 27, 2012
NANOWORLD AG
Thomas Sulzbach
B81 - MICRO-STRUCTURAL TECHNOLOGY