Wolfgang Fallot-Burghardt

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Bad Durkheim, DE

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Patents Grantslast 30 patents

Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 9,348,232
- Issue date May 24, 2016
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20100309449
- Publication date Dec 9, 2010
- Carl Zeiss SMT AG
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY