Wolfgang Fukarek

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Fischbach b. Arnsdorf i. S., DE

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Patents Grantslast 30 patents

Information Patent Grant
Processes and device for the deposition of films on substrates
- Patent number 8,475,635
- Issue date Jul 2, 2013
- Carl Zeiss SMT GmbH
- Andrey E. Yakshin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processes and device for the deposition of films on substrates
- Patent number 8,025,777
- Issue date Sep 27, 2011
- Carl Zeiss SMT GmbH
- Andrey E. Yakshin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESSES AND DEVICE FOR THE DEPOSITION OF FILMS ON SUBSTRATES
- Publication number 20110303529
- Publication date Dec 15, 2011
- Carl Zeiss SMT GMBH
- Andrey E. YAKSHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSES AND DEVICE FOR THE DEPOSITION OF FILMS ON SUBSTRATES
- Publication number 20090223812
- Publication date Sep 10, 2009
- Carl Zeiss SMT AG
- Andrey E. YAKSHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processes and device for the deposition of films on substrates
- Publication number 20050150758
- Publication date Jul 14, 2005
- Andrey E. Yakshin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...