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Wolfgang Hafner
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Koenigsbronn, DE
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Patents Grants
last 30 patents
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Patent Grant
Optical component having an improved transient thermal behavior and...
Patent number
7,965,456
Issue date
Jun 21, 2011
Carl Zeiss SMT GmbH
Wilhelm Egle
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Optical component having an improved transient thermal behavior and...
Patent number
7,483,223
Issue date
Jan 27, 2009
Carl Zeiss SMT AG
Wilhelm Egle
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
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Patent Application
OPTICAL COMPONENT HAVING AN IMPROVED TRANSIENT THERMAL BEHAVIOR AND...
Publication number
20110211180
Publication date
Sep 1, 2011
Carl Zeiss SMT GMBH
Wilhelm Egle
B82 - NANO-TECHNOLOGY
Information
Patent Application
Optical Component Having an Improved Transient Thermal Behavior and...
Publication number
20090021950
Publication date
Jan 22, 2009
Wilhelm Egle
B82 - NANO-TECHNOLOGY
Information
Patent Application
Optical component having an improved transient thermal behavior and...
Publication number
20060093253
Publication date
May 4, 2006
Wilhelm Egle
B82 - NANO-TECHNOLOGY