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Wolfgang HENKE
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithography system and a machine learning controller for such a lit...
Patent number
9,971,251
Issue date
May 15, 2018
ASML Netherlands B.V.
Emil Peter Schmitt-Weaver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
LITHOGRAPHY SYSTEM AND A MACHINE LEARNING CONTROLLER FOR SUCH A LIT...
Publication number
20160170311
Publication date
Jun 16, 2016
ASML NETHERLANDS B.V.
Emil Peter SCHMITT-WEAVER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY