Wolfgang Henke

Person

Kempen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Device manufacturing method
- Patent number 11,709,434
- Issue date Jul 25, 2023
- ASML Netherlands B.V.
- Rizvi Rahman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for measurement of alignment
- Patent number 11,249,404
- Issue date Feb 15, 2022
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for controlling lithographic apparatus, lithographic appara...
- Patent number 11,150,565
- Issue date Oct 19, 2021
- ASML Netherlands B.V.
- Rene Marinus Gerardus Johan Queens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus to correct for patterning process error
- Patent number 10,915,689
- Issue date Feb 9, 2021
- ASML Netherlands B.V.
- Peter Ten Berge
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods for controlling lithographic apparatus, lithographic appara...
- Patent number 10,845,719
- Issue date Nov 24, 2020
- ASML Netherlands B.V.
- Rene Marinus Gerardus Johan Queens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of sequencing lots for a lithographic apparatus
- Patent number 10,281,825
- Issue date May 7, 2019
- ASML Netherlands B.V.
- Michiel Kupers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with data processing apparatus
- Patent number 10,078,273
- Issue date Sep 18, 2018
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of calibrating a lithographic apparatus, device manufacturin...
- Patent number 9,715,181
- Issue date Jul 25, 2017
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of operating a lithographic apparatus, device manufacturing...
- Patent number 9,507,279
- Issue date Nov 29, 2016
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR OPTIMIZING A SAMPLING SCHEME AND ASSOCIATED APPARATUSES
- Publication number 20230176490
- Publication date Jun 8, 2023
- ASML NETHERLANDS B.V.
- Sarathi ROY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE MANUFACTURING METHOD
- Publication number 20220276570
- Publication date Sep 1, 2022
- ASML NETHERLANDS B.V.
- Rizvi RAHMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and Method for Measurement of Alignment
- Publication number 20200133144
- Publication date Apr 30, 2020
- ASML NETHERLANDS B.V.
- Emil Peter SCHMITT-WEAVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR CONTROLLING LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARA...
- Publication number 20190384188
- Publication date Dec 19, 2019
- ASML NETHERLANDS B.V.
- Rene Marinus Gerardus Johan QUEENS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF SEQUENCING LOTS FOR A LITHOGRAPHIC APPARATUS
- Publication number 20190072857
- Publication date Mar 7, 2019
- ASML NETHERLANDS B.V.
- Michiel KUPERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS TO CORRECT FOR PATTERNING PROCESS ERROR
- Publication number 20180307135
- Publication date Oct 25, 2018
- ASML NETHERLANDS B.V.
- Peter TEN BERGE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS WITH DATA PROCESSING APPARATUS
- Publication number 20160370711
- Publication date Dec 22, 2016
- ASML NETHERLANDS B.V.
- Emil Peter SCHMITT-WEAVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CALIBRATING A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURIN...
- Publication number 20140168620
- Publication date Jun 19, 2014
- ASML NETHERLANDS B.V.
- Emil Peter SCHMITT-WEAVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Operating a Lithographic Apparatus, Device Manufacturing...
- Publication number 20140168627
- Publication date Jun 19, 2014
- ASML NETHERLANDS B.V.
- Emil Peter SCHMITT-WEAVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Wolfgang Henke

Person

Patents Grantslast 30 patents

Device manufacturing method

System and method for measurement of alignment

Methods for controlling lithographic apparatus, lithographic appara...

Method and apparatus to correct for patterning process error

Methods for controlling lithographic apparatus, lithographic appara...

Method of sequencing lots for a lithographic apparatus

Lithographic apparatus with data processing apparatus

Method of calibrating a lithographic apparatus, device manufacturin...

Method of operating a lithographic apparatus, device manufacturing...

Patents Applicationslast 30 patents

METHOD FOR OPTIMIZING A SAMPLING SCHEME AND ASSOCIATED APPARATUSES

DEVICE MANUFACTURING METHOD

System and Method for Measurement of Alignment

METHODS FOR CONTROLLING LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARA...

METHOD OF SEQUENCING LOTS FOR A LITHOGRAPHIC APPARATUS

METHOD AND APPARATUS TO CORRECT FOR PATTERNING PROCESS ERROR

LITHOGRAPHIC APPARATUS WITH DATA PROCESSING APPARATUS

METHOD OF CALIBRATING A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURIN...

Method of Operating a Lithographic Apparatus, Device Manufacturing...