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Wolfgang Henke
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Radebeul, DE
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Patents Grants
last 30 patents
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Patent Grant
Alignment calculation
Patent number
8,440,475
Issue date
May 14, 2013
Qimonda AG
Boris Habets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for producing a phase mask
Patent number
7,462,426
Issue date
Dec 9, 2008
Infineon Technologies AG
Wolfgang Henke
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Alignment Calculation
Publication number
20100030360
Publication date
Feb 4, 2010
Boris Habets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask Structure for Manufacturing an Integrated Circuit by Photolith...
Publication number
20080204686
Publication date
Aug 28, 2008
Wolfgang Henke
G02 - OPTICS
Information
Patent Application
Method for producing a phase mask
Publication number
20050196683
Publication date
Sep 8, 2005
Wolfgang Henke
G02 - OPTICS
Information
Patent Application
Method for the characterization of an illumination source in an exp...
Publication number
20040027553
Publication date
Feb 12, 2004
Wolfgang Henke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY