Wolfgang Hoegele

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for predicting at least one illumination parameter for evalu...
- Patent number 10,394,128
- Issue date Aug 27, 2019
- Carl Zeiss SMT GmbH
- Ralf Gehrke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for predicting at least one illumination parameter for evalu...
- Patent number 10,078,267
- Issue date Sep 18, 2018
- Carl Zeiss SMT GmbH
- Ralf Gehrke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,910,359
- Issue date Mar 6, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,500,954
- Issue date Nov 22, 2016
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,310,690
- Issue date Apr 12, 2016
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PREDICTING AT LEAST ONE ILLUMINATION PARAMETER FOR EVALU...
- Publication number 20190004432
- Publication date Jan 3, 2019
- Carl Zeiss SMT GMBH
- Ralf Gehrke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PREDICTING AT LEAST ONE ILLUMINATION PARAMETER FOR EVALU...
- Publication number 20170212426
- Publication date Jul 27, 2017
- Carl Zeiss SMT GMBH
- Ralf Gehrke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20160209759
- Publication date Jul 21, 2016
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20150146184
- Publication date May 28, 2015
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20150146183
- Publication date May 28, 2015
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G02 - OPTICS