Wolfgang Hummel

Person

Schwabach Gmand, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for improving the imaging properties of a projection objecti...
- Patent number 9,581,813
- Issue date Feb 28, 2017
- Carl Zeiss SMT GmbH
- Olaf Conradi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for improving the imaging properties of a projection objecti...
- Patent number 9,069,263
- Issue date Jun 30, 2015
- Carl Zeiss SMT GmbH
- Olaf Conradi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 8,514,371
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective of a microlithographic projection exposure app...
- Patent number 7,990,622
- Issue date Aug 2, 2011
- Carl Zeiss SMT GmbH
- Olaf Conradi
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,961,294
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective of a microlithographic projection exposure app...
- Patent number 7,830,611
- Issue date Nov 9, 2010
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Grant
Method for improving the imaging properties of a projection objecti...
- Patent number 7,777,963
- Issue date Aug 17, 2010
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,710,542
- Issue date May 4, 2010
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,486,382
- Issue date Feb 3, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,304,717
- Issue date Dec 4, 2007
- Carl Zelss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement
- Patent number 6,781,668
- Issue date Aug 24, 2004
- Carl-Zeiss-Stiftung
- Karl-Heinz Schuster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system
- Patent number 6,583,850
- Issue date Jun 24, 2003
- Carl-Zeiss-Stiftung
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element mount comprising an optical element holding frame
- Patent number 6,538,829
- Issue date Mar 25, 2003
- Carl-Zeiss-Stiftung
- Johannes Rau
- G02 - OPTICS
Information Patent Grant
Optical systems and methods of compensating rotationally non-symmet...
- Patent number 6,522,392
- Issue date Feb 18, 2003
- Carl-Zeiss-Stiftung
- Werner Müller-Rissmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement having improved temperature distribution within...
- Patent number 6,521,877
- Issue date Feb 18, 2003
- Carl-Zeiss-Stiftung
- Werner Müller-Rissmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement
- Patent number 6,504,597
- Issue date Jan 7, 2003
- Carl-Zeiss-Stiftung
- Karl-Heinz Schuster
- G02 - OPTICS
Information Patent Grant
Optical arrangement
- Patent number 6,466,382
- Issue date Oct 15, 2002
- Carl-Zeiss-Stiftung
- Werner Müller-Rissmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR IMPROVING THE IMAGING PROPERTIES OF A PROJECTION OBJECTI...
- Publication number 20150293352
- Publication date Oct 15, 2015
- Carl Zeiss SMT GMBH
- Olaf Conradi
- G02 - OPTICS
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20110199597
- Publication date Aug 18, 2011
- Carl Zeiss SMT GMBH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20110019169
- Publication date Jan 27, 2011
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Application
METHOD FOR IMPROVING THE IMAGING PROPERTIES OF A PROJECTION OBJECTI...
- Publication number 20100290024
- Publication date Nov 18, 2010
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Application
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD
- Publication number 20100128367
- Publication date May 27, 2010
- Carl Zeiss SMT AG
- Mariella Beckenbach
- G02 - OPTICS
Information Patent Application
Imaging Device in a Projection Exposure Machine
- Publication number 20090141258
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20090040487
- Publication date Feb 12, 2009
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Improving the Imaging Properties of a Projection Objecti...
- Publication number 20080310029
- Publication date Dec 18, 2008
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20080239503
- Publication date Oct 2, 2008
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE
- Publication number 20080174757
- Publication date Jul 24, 2008
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging device in a projection exposure machine
- Publication number 20060164619
- Publication date Jul 27, 2006
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging device in a projection exposure facility
- Publication number 20040263812
- Publication date Dec 30, 2004
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ARRANGEMENT
- Publication number 20020126400
- Publication date Sep 12, 2002
- Wemer Muller-Rissmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical element mount comprising an optical element holding frame
- Publication number 20020067555
- Publication date Jun 6, 2002
- Johannes Rau
- G02 - OPTICS
Information Patent Application
Optical arrangement
- Publication number 20010019403
- Publication date Sep 6, 2001
- Karl-Heinz Schuster
- G02 - OPTICS
Information Patent Application
Optical system
- Publication number 20010008440
- Publication date Jul 19, 2001
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical arrangement
- Publication number 20010006412
- Publication date Jul 5, 2001
- Schuster Karl-Heinz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Wolfgang Hummel

Person

Patents Grantslast 30 patents

Method for improving the imaging properties of a projection objecti...

Method for improving the imaging properties of a projection objecti...

Imaging device in a projection exposure facility

Projection objective of a microlithographic projection exposure app...

Imaging device in a projection exposure facility

Projection objective of a microlithographic projection exposure app...

Method for improving the imaging properties of a projection objecti...

Imaging device in a projection exposure machine

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility

Optical arrangement

Optical system

Optical element mount comprising an optical element holding frame

Optical systems and methods of compensating rotationally non-symmet...

Optical arrangement having improved temperature distribution within...

Optical arrangement

Optical arrangement

Patents Applicationslast 30 patents

METHOD FOR IMPROVING THE IMAGING PROPERTIES OF A PROJECTION OBJECTI...

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

METHOD FOR IMPROVING THE IMAGING PROPERTIES OF A PROJECTION OBJECTI...

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD

Imaging Device in a Projection Exposure Machine

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

Method for Improving the Imaging Properties of a Projection Objecti...

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility

OPTICAL ARRANGEMENT

Optical element mount comprising an optical element holding frame

Optical arrangement

Optical system

Optical arrangement