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Wolfgang Kahler
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Aalen, DE
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last 30 patents
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Patent Grant
Interferometer system and method for recording an interferogram usi...
Patent number
7,002,694
Issue date
Feb 21, 2006
Carl Zeiss SMT AG
Stefan Schulte
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Interferometer system, method for recording an interferogram and me...
Publication number
20040190002
Publication date
Sep 30, 2004
Carl Zeiss SMT AG
Stefan Schulte
G01 - MEASURING TESTING