Wolfgang Keller

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Erbach, DE

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Patents Grantslast 30 patents

Information Patent Grant
Reflecting optical element with eccentric optical passageway
- Patent number 7,760,327
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Hans-Jürgen Scherle
- G02 - OPTICS
Information Patent Grant
Optical subassembly and projection objective in semiconductor litho...
- Patent number 7,448,763
- Issue date Nov 11, 2008
- Carl Zeiss SMT AG
- Andreas Frommeyer
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Optical subassembly and projection objective in semiconductor litho...
- Publication number 20070014037
- Publication date Jan 18, 2007
- Andreas Frommeyer
- G02 - OPTICS
Information Patent Application
Reflecting optical element with eccentric optical passageway
- Publication number 20060262704
- Publication date Nov 23, 2006
- Carl Zeiss SMT AG
- Hans-Jurgen Scherle
- G02 - OPTICS