Wolfgang Lammer-Pachlinger

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Vienna, AT

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Patents Grantslast 30 patents

Information Patent Grant
Pattern-definition device for maskless particle-beam exposure appar...
- Patent number 7,084,411
- Issue date Aug 1, 2006
- IMS Nanofabrication GmbH
- Wolfgang Lammer-Pachlinger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Pattern-definition device for maskless particle-beam exposure appar...
- Publication number 20050087701
- Publication date Apr 28, 2005
- IMS Nanofabrication GmbH
- Wolfgang Lammer-Pachlinger
- B82 - NANO-TECHNOLOGY