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Wolfgang Merkel
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Neu-Ulm, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for repairing reflective optical elements for EUV lithography
Patent number
11,099,484
Issue date
Aug 24, 2021
Carl Zeiss SMT GmbH
Robert Meier
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Optical element, in particular for a microlithographic projection e...
Patent number
10,578,974
Issue date
Mar 3, 2020
Carl Zeiss SMT GmbH
Ralf Moser
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
EUV Collector
Patent number
10,503,075
Issue date
Dec 10, 2019
Carl Zeiss SMT GmbH
Ingrid Schuster
G02 - OPTICS
Information
Patent Grant
Optical assembly, projection system, metrology system and EUV litho...
Patent number
10,146,048
Issue date
Dec 4, 2018
Carl Zeiss SMT GmbH
Michael Brehm
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
OPTICAL ELEMENT, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION E...
Publication number
20190302624
Publication date
Oct 3, 2019
Carl Zeiss SMT GMBH
Ralf Moser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR REPAIRING REFLECTIVE OTPICAL ELEMENTS FOR EUV LITHOGRAPHY
Publication number
20190302628
Publication date
Oct 3, 2019
Carl Zeiss SMT GMBH
Robert MEIER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV COLLECTOR
Publication number
20190094699
Publication date
Mar 28, 2019
Carl Zeiss SMT GMBH
Ingrid Schuster
G02 - OPTICS
Information
Patent Application
OPTICAL ASSEMBLY, PROJECTION SYSTEM, METROLOGY SYSTEM AND EUV LITHO...
Publication number
20170102539
Publication date
Apr 13, 2017
Carl Zeiss SMT GMBH
Michael BREHM
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE
Publication number
20120154895
Publication date
Jun 21, 2012
CARL ZEISS LASER OPTICS GmbH
Holger Muenz
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR