Wolfgang Singer

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Rochester, MN, US

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Patents Grantslast 30 patents

Information Patent Grant
Catadioptric projection objective
- Patent number 8,730,572
- Issue date May 20, 2014
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 8,355,201
- Issue date Jan 15, 2013
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20120250147
- Publication date Oct 4, 2012
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20110211252
- Publication date Sep 1, 2011
- David Shafer
- G02 - OPTICS