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Wolfgang Sulik
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Asslar, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for focusing an object plane and optical assembly
Patent number
9,091,525
Issue date
Jul 28, 2015
KLA-Tencor MIE GmbH
Wolfgang Sulik
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method of inspecting the surface of a wafer
Patent number
7,545,489
Issue date
Jun 9, 2009
Vistec Semiconductor Systems GmbH
Wolfgang Sulik
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Method for focusing an object plane and optical assembly
Publication number
20110205553
Publication date
Aug 25, 2011
KLA-TENCOR MIE GMBH
Wolfgang Sulik
G02 - OPTICS
Information
Patent Application
Arrangement and method for improving the measurement accuracy in th...
Publication number
20090066970
Publication date
Mar 12, 2009
MueTec Automatisierte Mikroskopie und Messtechnik GmbH
Gerd Scheuring
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD OF INSPECTING THE SURFACE OF A WAFER
Publication number
20070052954
Publication date
Mar 8, 2007
Vistec Semiconductor Systems GmbH
Wolfgang Sulik
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for optically detecting an object
Publication number
20060275017
Publication date
Dec 7, 2006
Vistec Semiconductor Systems GmbH
Wolfgang Sulik
G02 - OPTICS
Information
Patent Application
Apparatus and method for inspecting a wafer
Publication number
20060262295
Publication date
Nov 23, 2006
Vistec Semiconductor Systems GmbH
Henning Backhauss
G01 - MEASURING TESTING