Wolfram Neff

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Woburn, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Inductively coupled plasma light source
- Patent number 12,165,856
- Issue date Dec 10, 2024
- Hamamatsu Photonics K.K.
- Stephen F. Horne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and method of making same
- Patent number 10,497,598
- Issue date Dec 3, 2019
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Inductively Coupled Plasma Light Source
- Publication number 20250069870
- Publication date Feb 27, 2025
- Hamamatsu Photonics K. K.
- Stephen F. Horne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively Coupled Plasma Light Source with Direct Gas Injection
- Publication number 20240194454
- Publication date Jun 13, 2024
- Hamamatsu Photonics K. K.
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively Coupled Plasma Light Source
- Publication number 20230268167
- Publication date Aug 24, 2023
- Hamamatsu Photonics K. K.
- Stephen F. Horne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTICLES COATED WITH CRACK-RESISTANT FLUORO-ANNEALED FILMS AND METH...
- Publication number 20220154325
- Publication date May 19, 2022
- Entegris, Inc.
- Nilesh Gunda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic Chuck and Method of Making Same
- Publication number 20160336210
- Publication date Nov 17, 2016
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS