Membership
Tour
Register
Log in
Won-Jae JANG
Follow
Person
Gyeonggi-do, KR
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method to determine a patterning process parameter
Patent number
11,300,883
Issue date
Apr 12, 2022
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and apparatus and computer program
Patent number
10,908,513
Issue date
Feb 2, 2021
ASML Netherlands B.V.
Marc Johannes Noot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method to Determine a Patterning Process Parameter
Publication number
20190094703
Publication date
Mar 28, 2019
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Method and Apparatus and Computer Program
Publication number
20190033727
Publication date
Jan 31, 2019
ASML NETHERLANDS B.V.
Marc Johannes NOOT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY