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Won Lee
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Albuquerque, NM, US
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Patents Grants
last 30 patents
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Patent Grant
Sensor for measuring liquid contaminants in a semiconductor wafer f...
Patent number
7,696,538
Issue date
Apr 13, 2010
Novellus Systems, Inc.
Won Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid detection end effector sensor and method of using the same
Patent number
7,084,466
Issue date
Aug 1, 2006
Novellus Systems, Inc.
Won Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Liquid detection end effector sensor and method of using the same
Publication number
20060169977
Publication date
Aug 3, 2006
Novellus Systems, Inc.
Won Lee
H01 - BASIC ELECTRIC ELEMENTS