WonLae KIM

Person

Suwon, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Nitride etchant composition and method
- Patent number 12,152,187
- Issue date Nov 26, 2024
- Entegris, Inc.
- Eric Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and composition for etching molybdenum
- Patent number 11,492,709
- Issue date Nov 8, 2022
- Entegris, Inc.
- Atanu K. Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Post-etch residue removal for advanced node beol processing
- Patent number 10,790,187
- Issue date Sep 29, 2020
- Entegris, Inc.
- Emanuel I. Cooper
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Cleaning compositions for removing post etch residue
- Patent number 10,577,567
- Issue date Mar 3, 2020
- Entegris, Inc.
- Makonnen Payne
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Use of non-oxidizing strong acids for the removal of ion-implanted...
- Patent number 10,347,504
- Issue date Jul 9, 2019
- Entegris, Inc.
- Steven Bilodeau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ETCHANT COMPOSITION AND METHOD
- Publication number 20230383185
- Publication date Nov 30, 2023
- Entegris, Inc.
- JeongYeol Yang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM
- Publication number 20230030323
- Publication date Feb 2, 2023
- Entegris, Inc.
- Atanu K. Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE REMOVAL OF METAL OXIDE HARD MASKS
- Publication number 20220208553
- Publication date Jun 30, 2022
- Entegris, Inc.
- SeungHyun Chae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITRIDE ETCHANT COMPOSITION AND METHOD
- Publication number 20220049160
- Publication date Feb 17, 2022
- Entegris, Inc.
- Eric HONG
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM
- Publication number 20210324525
- Publication date Oct 21, 2021
- Entegris, Inc.
- Atanu K. DAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...
- Publication number 20180240680
- Publication date Aug 23, 2018
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST-ETCH RESIDUE REMOVAL FOR ADVANCED NODE BEOL PROCESSING
- Publication number 20180204764
- Publication date Jul 19, 2018
- Entegris, Inc.
- Emanuel I. Cooper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING COMPOSITIONS FOR REMOVING POST ETCH RESIDUE
- Publication number 20180148669
- Publication date May 31, 2018
- Entegris, Inc.
- Makonnen Payne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...
- Publication number 20160322232
- Publication date Nov 3, 2016
- Entegris, Inc.
- Steven BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Nitride etchant composition and method

Method and composition for etching molybdenum

Post-etch residue removal for advanced node beol processing

Cleaning compositions for removing post etch residue

Use of non-oxidizing strong acids for the removal of ion-implanted...

Patents Applicationslast 30 patents

ETCHANT COMPOSITION AND METHOD

METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM

SELECTIVE REMOVAL OF METAL OXIDE HARD MASKS

NITRIDE ETCHANT COMPOSITION AND METHOD

METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM

USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...

POST-ETCH RESIDUE REMOVAL FOR ADVANCED NODE BEOL PROCESSING

CLEANING COMPOSITIONS FOR REMOVING POST ETCH RESIDUE

USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...