Wonsuk Chung

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Low temperature amorphous silicon sacrificial layer for controlled...
- Patent number 8,358,458
- Issue date Jan 22, 2013
- QUALCOMM MEMS Technologies, Inc.
- James Randolph Webster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical devices having support structures
- Patent number 8,344,470
- Issue date Jan 1, 2013
- QUALCOMM MEMS Technologies, Inc.
- Jeffrey B. Sampsell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and interconnects for same
- Patent number 8,097,174
- Issue date Jan 17, 2012
- QUALCOMM MEMS Technologies, Inc.
- Wonsuk Chung
- G02 - OPTICS
Information Patent Grant
Silicon-rich silicon nitrides as etch stops in MEMS manufacture
- Patent number 8,064,124
- Issue date Nov 22, 2011
- QUALCOMM MEMS Technologies, Inc.
- Wonsuk Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices having support structures
- Patent number 7,936,031
- Issue date May 3, 2011
- QUALCOMM MEMS Technologies, Inc.
- Jeffrey B. Sampsell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature amorphous silicon sacrificial layer for controlled...
- Patent number 7,851,239
- Issue date Dec 14, 2010
- QUALCOMM MEMS Technologies, Inc.
- James Randolph Webster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and interconnects for same
- Patent number 7,706,042
- Issue date Apr 27, 2010
- QUALCOMM MEMS Technologies, Inc.
- Wonsuk Chung
- G02 - OPTICS
Information Patent Grant
Patterning of mechanical layer in MEMS to reduce stresses at supports
- Patent number 7,405,863
- Issue date Jul 29, 2008
- QUALCOMM MEMS Technologies, Inc.
- Ming-Hau Tung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon-rich silicon nitrides as etch stops in MEMS manufacture
- Patent number 7,382,515
- Issue date Jun 3, 2008
- QUALCOMM MEMS Technologies, Inc.
- Wonsuk Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ELECTROMECHANICAL DEVICES HAVING SUPPORT STRUCTURES AND METHODS OF...
- Publication number 20110205197
- Publication date Aug 25, 2011
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Jeffrey B. Sampsell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...
- Publication number 20110051224
- Publication date Mar 3, 2011
- QUALCOMM MEMS TECHNOLOGIES, INC.
- James Randolph Webster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND INTERCONNECTS FOR SAME
- Publication number 20100202038
- Publication date Aug 12, 2010
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Wonsuk Chung
- G02 - OPTICS
Information Patent Application
LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...
- Publication number 20090305010
- Publication date Dec 10, 2009
- QUALCOMM MEMS TECHNOLOGIES, INC.
- James Randolph Webster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILICON-RICH SILICON NITRIDES AS ETCH STOP IN MEMS MANUFACTURE
- Publication number 20080226929
- Publication date Sep 18, 2008
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Wonsuk Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND INTERCONNECTS FOR SAME
- Publication number 20080151352
- Publication date Jun 26, 2008
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Wonsuk Chung
- G02 - OPTICS
Information Patent Application
Patterning of mechanical layer in MEMS to reduce stresses at supports
- Publication number 20070279753
- Publication date Dec 6, 2007
- Ming-Hau Tung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Silicon-rich silicon nitrides as etch stops in MEMS manufature
- Publication number 20070170540
- Publication date Jul 26, 2007
- Wonsuk Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS devices having support structures and methods of fabricating t...
- Publication number 20070047900
- Publication date Mar 1, 2007
- Jeffrey B. Sampsell
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Wonsuk Chung

Person

Patents Grantslast 30 patents

Low temperature amorphous silicon sacrificial layer for controlled...

Electromechanical devices having support structures

MEMS device and interconnects for same

Silicon-rich silicon nitrides as etch stops in MEMS manufacture

MEMS devices having support structures

Low temperature amorphous silicon sacrificial layer for controlled...

MEMS device and interconnects for same

Patterning of mechanical layer in MEMS to reduce stresses at supports

Silicon-rich silicon nitrides as etch stops in MEMS manufacture

Patents Applicationslast 30 patents

ELECTROMECHANICAL DEVICES HAVING SUPPORT STRUCTURES AND METHODS OF...

LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...

MEMS DEVICE AND INTERCONNECTS FOR SAME

LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...

SILICON-RICH SILICON NITRIDES AS ETCH STOP IN MEMS MANUFACTURE

MEMS DEVICE AND INTERCONNECTS FOR SAME

Patterning of mechanical layer in MEMS to reduce stresses at supports

Silicon-rich silicon nitrides as etch stops in MEMS manufature

MEMS devices having support structures and methods of fabricating t...