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last 30 patents
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Patent Grant
Preparation of lanthanide-containing precursors and deposition of l...
Patent number
11,784,041
Issue date
Oct 10, 2023
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Daehyeon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Area selective deposition of metal containing films
Patent number
11,319,449
Issue date
May 3, 2022
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Wontae Noh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lanthanide precursors and deposition of lanthanide-containing films...
Patent number
11,242,597
Issue date
Feb 8, 2022
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Satoko Gatineau
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Zirconium, hafnium, titanium precursors and deposition of group 4 c...
Patent number
10,895,012
Issue date
Jan 19, 2021
L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
Satoko Gatineau
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Zirconium, hafnium, titanium precursors and deposition of group 4 c...
Patent number
10,465,289
Issue date
Nov 5, 2019
L'Air Liquide, Société Anonyme pour l'Etude at l'Exploitation des Procédés Ge...
Satoko Gatineau
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Zirconium, hafnium, titanium precursors and deposition of group 4 c...
Patent number
10,364,259
Issue date
Jul 30, 2019
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Daehyeon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Zirconium, hafnium, titanium precursors and deposition of group 4 c...
Patent number
10,337,104
Issue date
Jul 2, 2019
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Satoko Gatineau
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Niobium-containing film forming compositions and vapor deposition o...
Patent number
10,174,423
Issue date
Jan 8, 2019
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Clément Lansalot-Matras
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Group 5 transition metal-containing compounds for vapor deposition...
Patent number
10,106,887
Issue date
Oct 23, 2018
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Clément Lansalot-Matras
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Niobium-Nitride film forming compositions and vapor deposition of N...
Patent number
10,023,462
Issue date
Jul 17, 2018
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Clément Lansalot-Matras
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Niobium-containing film forming compositions and vapor deposition o...
Patent number
9,786,671
Issue date
Oct 10, 2017
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Clément Lansalot-Matras
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tantalum-containing film forming compositions and vapor deposition...
Patent number
9,748,249
Issue date
Aug 29, 2017
L'Air Liquide, Société Anonyme l'Etude et l'Exploitation des Procédés Georges...
Clément Lansalot-Matras
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Preparation of lanthanide-containing precursors and deposition of l...
Patent number
9,711,347
Issue date
Jul 18, 2017
American Air Liquide, Inc.
Venkateswara R. Pallem
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vanadium-containing film forming compositions and vapor deposition...
Patent number
9,691,771
Issue date
Jun 27, 2017
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Clément Lansalot-Matras
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vanadium-containing film forming compositions and vapor deposition...
Patent number
9,691,770
Issue date
Jun 27, 2017
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Clément Lansalot-Matras
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Group 5 cyclopentadienyl transition metal-containing precursors for...
Patent number
9,518,075
Issue date
Dec 13, 2016
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Clément Lansalot-Matras
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Preparation of cerium-containing precursor and deposition of cerium...
Patent number
9,384,963
Issue date
Jul 5, 2016
American Air Liquide, Inc.
Venkateswara R. Pallem
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
NIOBIUM, VANADIUM, TANTALUM FILM FORMING COMPOSITIONS AND DEPOSITIO...
Publication number
20230323530
Publication date
Oct 12, 2023
L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitatation des Procédés...
Daehyeon KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING DIELECTRIC FILMS, NEW PRECURSORS AND THEIR USE IN...
Publication number
20230313375
Publication date
Oct 5, 2023
L'Air Liquide Societe Anonyme pour I'Etude et I'Exploitation des Procedes Geo...
Daehyeon KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PREPARATION OF LANTHANIDE-CONTAINING PRECURSORS AND DEPOSITION OF L...
Publication number
20230253200
Publication date
Aug 10, 2023
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Daehyeon KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GROUP IV ELEMENT CONTAINING PRECURSORS AND DEPOSITION OF GROUP IV E...
Publication number
20220205099
Publication date
Jun 30, 2022
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Su-Hyun KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF IMPROVING STEP COVERAGE USING AN INHIBITOR MOLECULE FOR H...
Publication number
20220119939
Publication date
Apr 21, 2022
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Wontae NOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Area selective deposition of metal containing films
Publication number
20210189146
Publication date
Jun 24, 2021
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Wontae NOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GROUP V ELEMENT-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPO...
Publication number
20210189145
Publication date
Jun 24, 2021
L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
Wontae NOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LANTHANIDE PRECURSORS AND DEPOSITION OF LANTHANIDE-CONTAINING FILMS...
Publication number
20200149156
Publication date
May 14, 2020
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Satoko GATINEAU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 C...
Publication number
20200149165
Publication date
May 14, 2020
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Wontae NOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 C...
Publication number
20200032397
Publication date
Jan 30, 2020
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Satoko GATINEAU
C07 - ORGANIC CHEMISTRY
Information
Patent Application
ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 C...
Publication number
20190249305
Publication date
Aug 15, 2019
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Satoko GATINEAU
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
LANTHANIDE PRECURSORS AND DEPOSITION OF LANTHANIDE-CONTAINING FILMS...
Publication number
20180187303
Publication date
Jul 5, 2018
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Satoko GATINEAU
C07 - ORGANIC CHEMISTRY
Information
Patent Application
NIOBIUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION O...
Publication number
20170298511
Publication date
Oct 19, 2017
Clément LANSALOT-MATRAS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NIOBIUM-NITRIDE FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION OF N...
Publication number
20170152144
Publication date
Jun 1, 2017
Clément Lansalot-Matras
C07 - ORGANIC CHEMISTRY
Information
Patent Application
ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 C...
Publication number
20170107623
Publication date
Apr 20, 2017
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Daehyeon KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 C...
Publication number
20170107612
Publication date
Apr 20, 2017
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Wontae NOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 C...
Publication number
20170107617
Publication date
Apr 20, 2017
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Satoko GATINEAU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 C...
Publication number
20170107618
Publication date
Apr 20, 2017
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Satoko GATINEAU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VANADIUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION...
Publication number
20160304542
Publication date
Oct 20, 2016
L'Air Liquide, Societe Anonyme pour I'Etude et l'Exploitation des Procedes Ge...
Clément LANSALOT-MATRAS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VANADIUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION...
Publication number
20160307905
Publication date
Oct 20, 2016
L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
Clément LANSALOT-MATRAS
C07 - ORGANIC CHEMISTRY
Information
Patent Application
NIOBIUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION O...
Publication number
20160307904
Publication date
Oct 20, 2016
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Clément LANSALOT-MATRAS
C07 - ORGANIC CHEMISTRY
Information
Patent Application
TANTALUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION...
Publication number
20160307708
Publication date
Oct 20, 2016
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Clément LANSALOT-MATRAS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NIOBIUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION O...
Publication number
20160307902
Publication date
Oct 20, 2016
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Clément LANSALOT-MATRAS
C07 - ORGANIC CHEMISTRY
Information
Patent Application
TANTALUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION...
Publication number
20160307903
Publication date
Oct 20, 2016
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Clément LANSALOT-MATRAS
C07 - ORGANIC CHEMISTRY
Information
Patent Application
PREPARATION OF LANTHANIDE-CONTAINING PRECURSORS AND DEPOSITION OF L...
Publication number
20160293409
Publication date
Oct 6, 2016
American Air Liquide, Inc.
Venkateswara R. PALLEM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GROUP 5 TRANSITION METAL-CONTAINING COMPOUNDS FOR VAPOR DEPOSITION...
Publication number
20160251756
Publication date
Sep 1, 2016
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Clement Lansalot-Matras
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TANTALUM- OR VANADIUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPO...
Publication number
20160083405
Publication date
Mar 24, 2016
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Clément LANSALOT-MATRAS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PREPARATION OF CERIUM-CONTAINING PRECURSOR AND DEPOSITION OF CERIUM...
Publication number
20140335702
Publication date
Nov 13, 2014
Venkateswara R. PALLEM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GROUP 5 CYCLOPENTADIENYL TRANSITION METAL-CONTAINING PRECURSORS FOR...
Publication number
20140106071
Publication date
Apr 17, 2014
L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
Clément LANSALOT-MATRAS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PREPARATION OF CERIUM-CONTAINING PRECURSORS AND DEPOSITION OF CERIU...
Publication number
20120156373
Publication date
Jun 21, 2012
American Air Liquide, Inc.
Venkateswara R. PALLEM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...