Woody CHUNG

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Burlingame, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Gas flow distribution receptacles, plasma generator systems, and me...
- Patent number 9,209,000
- Issue date Dec 8, 2015
- Novellus Systems, Inc.
- Huatan Qiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas flow distribution receptacles, plasma generator systems, and me...
- Patent number 8,110,068
- Issue date Feb 7, 2012
- Novellus Systems, Inc.
- Huatan Qiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAS FLOW DISTRIBUTION RECEPTACLES, PLASMA GENERATOR SYSTEMS, AND ME...
- Publication number 20120097331
- Publication date Apr 26, 2012
- Novellus Systems, Inc.
- Huatan QIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW DISTRIBUTION RECEPTACLES, PLASMA GENERATOR SYSTEMS, AND ME...
- Publication number 20090236313
- Publication date Sep 24, 2009
- Novellus Systems, Inc.
- Huatan QIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...