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Woon Ki Cho
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Gyeonggi-do, KR
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last 30 patents
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Patent Grant
Substrate rotating and oscillating apparatus for rapid thermal process
Patent number
8,346,068
Issue date
Jan 1, 2013
Asia Pacific Systems Inc.
Jang Woo Shim
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SUBSTRATE ROTATING AND OSCILLATING APPARATUS FOR RAPID THERMAL PROCESS
Publication number
20100322603
Publication date
Dec 23, 2010
Asia Pacific Systems Inc.
Jang Woo Shim
H01 - BASIC ELECTRIC ELEMENTS