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Patents Grantslast 30 patents

Information Patent Grant
Fluid supply apparatus and substrate processing apparatus including...
- Patent number 11,623,853
- Issue date Apr 11, 2023
- Samsung Electronics Co., Ltd.
- Kibeom Kil
- B67 - OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS LIQUID...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LOADING APPARATUS, SEMICONDUCTOR MANUFACTURING EQUIPMENT...
- Publication number 20240047253
- Publication date Feb 8, 2024
- Samsung Electronics Co., Ltd.
- Sangho JANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID SUPPLY APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20220396380
- Publication date Dec 15, 2022
- Samsung Electronics Co., Ltd.
- Kibeom KIL
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL