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Tai-Chung Hsien, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Front-opening unified pod auto-loading structure
Patent number
6,896,470
Issue date
May 24, 2005
Industrial Technology Research Institute
Kuan-Chou Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer loading system positioning method and device
Patent number
6,669,185
Issue date
Dec 30, 2003
Industrial Technology Research Institute
Wu-Lang Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Front-opening unified pod closing/opening control structure
Patent number
6,382,896
Issue date
May 7, 2002
Industrial Technology Research Institute
Ping-Yu Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two screws double-stroke and screw differential-motion mechanism ap...
Patent number
6,352,005
Issue date
Mar 5, 2002
Industrial Technology Reseach Institute
Wu-Lang Lin
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Wafer loading system positioning method and device
Publication number
20020041066
Publication date
Apr 11, 2002
Wu-Lang Lin
H01 - BASIC ELECTRIC ELEMENTS