Wu-Song Huang

Person

Poughkeepsie, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Coating compositions suitable for use with an overcoated photoresist
- Patent number 9,726,977
- Issue date Aug 8, 2017
- GLOBALFOUNDRIES Inc.
- James F. Cameron
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Near-infrared absorbing film compositions
- Patent number 9,465,290
- Issue date Oct 11, 2016
- GLOBALFOUNDRIES Inc.
- Wu-Song Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wet strip process for an antireflective coating layer
- Patent number 9,460,934
- Issue date Oct 4, 2016
- GLOBALFOUNDRIES Inc.
- Martin Glodde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming semiconductor structures with contact holes
- Patent number 9,449,822
- Issue date Sep 20, 2016
- GLOBALFOUNDRIES, INC.
- Wai-Kin Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Acid-strippable silicon-containing antireflective coating
- Patent number 9,348,228
- Issue date May 24, 2016
- GLOBALFOUNDRIES Inc.
- Martin Glodde
- G02 - OPTICS
Information Patent Grant
Dielectric tone inversion materials
- Patent number 9,337,033
- Issue date May 10, 2016
- International Business Machines Corporation
- Martin Glodde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to mitigate resist pattern critical dimension variation in a...
- Patent number 9,316,916
- Issue date Apr 19, 2016
- GLOBALFOUNRIES INC.
- Kuang-Jung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dielectric tone inversion materials
- Patent number 9,281,212
- Issue date Mar 8, 2016
- International Business Machines Corporation
- Martin Glodde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure photolithography methods
- Patent number 9,235,119
- Issue date Jan 12, 2016
- GLOBALFOUNDRIES Inc.
- Kuang-Jung Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Near-infrared absorptive layer-forming composition and multilayer film
- Patent number 9,069,245
- Issue date Jun 30, 2015
- Shin-Etsu Chemical Co., Ltd.
- Masaki Ohashi
- G02 - OPTICS
Information Patent Grant
Developable bottom antireflective coating composition and pattern f...
- Patent number 9,040,225
- Issue date May 26, 2015
- International Business Machines Corporation
- Kuang-Jung Chen
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Developable bottom antireflective coating composition and pattern f...
- Patent number 8,999,624
- Issue date Apr 7, 2015
- International Business Machines Corporation
- Kuang-Jung Chen
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Silicon-containing antireflective coatings including non-polymeric...
- Patent number 8,999,625
- Issue date Apr 7, 2015
- International Business Machines Corporation
- Martin Glodde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Hybrid photoresist composition and pattern forming method using the...
- Patent number 8,986,918
- Issue date Mar 24, 2015
- International Business Machines Corporation
- Gregory Breyta
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Hybrid photoresist composition and pattern forming method using the...
- Patent number 8,932,796
- Issue date Jan 13, 2015
- International Business Machines Corporation
- Kuang-Jung Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Photoresist composition containing a protected hydroxyl group for n...
- Patent number 8,846,295
- Issue date Sep 30, 2014
- International Business Machines Corporation
- Kuang-Jung Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Photoresist compositions
- Patent number 8,846,296
- Issue date Sep 30, 2014
- International Business Machines Corporation
- Kuang-Jung Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Silicon containing coating compositions and methods of use
- Patent number 8,802,347
- Issue date Aug 12, 2014
- International Business Machines Corporation
- Robert D. Allen
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Near-infrared absorbing film compositions
- Patent number 8,772,376
- Issue date Jul 8, 2014
- International Business Machines Corporation
- Wu-Song Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning process
- Patent number 8,759,220
- Issue date Jun 24, 2014
- Shin-Etsu Chemical Co., Ltd.
- Tsutomu Ogihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Near-infrared absorptive layer-forming composition and multilayer f...
- Patent number 8,722,307
- Issue date May 13, 2014
- International Business Machines Corporation
- Seiichiro Tachibana
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developable bottom antireflective coating compositions for negative...
- Patent number 8,715,907
- Issue date May 6, 2014
- International Business Machines Corporation
- Kuang-Jung Chen
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Forming sub-lithographic patterns using double exposure
- Patent number 8,609,327
- Issue date Dec 17, 2013
- International Business Machines Corporation
- Kuang-Jung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Near-infrared absorbing film compositions
- Patent number 8,586,283
- Issue date Nov 19, 2013
- International Business Machines Corporation
- Martin Glodde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multiple exposure photolithography methods
- Patent number 8,568,960
- Issue date Oct 29, 2013
- International Business Machines Corporation
- Kuang-Jung Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Developable bottom antireflective coating compositions especially s...
- Patent number 8,557,501
- Issue date Oct 15, 2013
- International Business Machines Corporation
- Wu-Song Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Self-forming top anti-reflective coating compositions and, photores...
- Patent number 8,546,062
- Issue date Oct 1, 2013
- International Business Machines Corporation
- Wu-Song Huang
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method for enhancing lithographic imaging of isolated and semi-isol...
- Patent number 8,546,069
- Issue date Oct 1, 2013
- International Business Machines Corporation
- Wu-Song Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming a pattern of an array of shapes including a block...
- Patent number 8,492,079
- Issue date Jul 23, 2013
- International Business Machines Corporation
- Chia-Chen Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Integration process to improve focus leveling within a lot process...
- Patent number 8,395,228
- Issue date Mar 12, 2013
- International Business Machines Corporation
- Wai-Kin Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DIELECTRIC TONE INVERSION MATERIALS
- Publication number 20160126097
- Publication date May 5, 2016
- International Business Machines Corporation
- Martin Glodde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND PATTERN F...
- Publication number 20150050601
- Publication date Feb 19, 2015
- International Business Machines Corporation
- Kuang-Jung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE PHOTOLITHOGRAPHY METHODS
- Publication number 20140349237
- Publication date Nov 27, 2014
- Kuang-Jung Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
WET STRIP PROCESS FOR AN ANTIREFLECTIVE COATING LAYER
- Publication number 20140273501
- Publication date Sep 18, 2014
- Shin-Etsu Chemical Company, Ltd
- Martin Glodde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON-CONTAINING ANTIREFLECTIVE COATINGS INCLUDING NON-POLYMERIC...
- Publication number 20140227641
- Publication date Aug 14, 2014
- SHIN-ETSU CHEMICAL CO., LTD.
- Martin Glodde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEAR-INFRARED ABSORBING FILM COMPOSITIONS
- Publication number 20140210034
- Publication date Jul 31, 2014
- International Business Machines Corporation
- Wu-Song Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACID-STRIPPABLE SILICON-CONTAINING ANTIREFLECTIVE COATING
- Publication number 20140186774
- Publication date Jul 3, 2014
- International Business Machines Corporation
- Martin Glodde
- G02 - OPTICS
Information Patent Application
PHOTORESIST COMPOSITION CONTAINING A PROTECTED HYDROXYL GROUP FOR N...
- Publication number 20140072915
- Publication date Mar 13, 2014
- International Business Machines Corporation
- Kuang-Jung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HYBRID PHOTORESIST COMPOSITION AND PATTERN FORMING METHOD USING THE...
- Publication number 20140072916
- Publication date Mar 13, 2014
- International Business Machines Corporation
- Gregory Breyta
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND PATTERN F...
- Publication number 20140004712
- Publication date Jan 2, 2014
- International Business Machines Corporation
- Kuang-Jung Chen
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR ENHANCING LITHOGRAPHIC IMAGING OF ISOLATED AND SEMI-ISOL...
- Publication number 20130330672
- Publication date Dec 12, 2013
- International Business Machines Corporation
- Wu-Song Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST COMPOSITION CONTAINING A PROTECTED HYDROXYL GROUP FOR N...
- Publication number 20130288178
- Publication date Oct 31, 2013
- International Business Machines Corporation
- Kuang-Jung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST COMPOSITION FOR NEGATIVE DEVELOPMENT AND PATTERN FORMIN...
- Publication number 20130164680
- Publication date Jun 27, 2013
- International Business Machines Corporation
- Kuang-Jung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEAR-INFRARED ABSORBING FILM COMPOSITION FOR LITHOGRAPHIC APPLICATION
- Publication number 20130157463
- Publication date Jun 20, 2013
- Shin-Etsu Chemical Co., Ltd.
- Dario L. Goldfarb
- G02 - OPTICS
Information Patent Application
HYBRID PHOTORESIST COMPOSITION AND PATTERN FORMING METHOD USING THE...
- Publication number 20130122421
- Publication date May 16, 2013
- International Business Machines Corporation
- Kuang-Jung Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR NEGATIVE...
- Publication number 20130040238
- Publication date Feb 14, 2013
- International Business Machines Corporation
- KUANG-JUNG CHEN
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Near-Infrared Absorbing Film Compositions
- Publication number 20130001484
- Publication date Jan 3, 2013
- International Business Machines Corporation
- Martin Glodde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEAR-INFRARED ABSORPTIVE LAYER-FORMING COMPOSITION AND MULTILAYER F...
- Publication number 20120301828
- Publication date Nov 29, 2012
- Seiichiro TACHIBANA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST COMPOSITIONS
- Publication number 20120214099
- Publication date Aug 23, 2012
- International Business Machines Corporation
- Kuang-Jung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTIPLE EXPOSURE PHOTOLITHOGRAPHY METHODS
- Publication number 20120178027
- Publication date Jul 12, 2012
- International Business Machines Corporation
- Kuang-Jung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS ESPECIALLY S...
- Publication number 20120178029
- Publication date Jul 12, 2012
- International Business Machines Corporation
- Wu-Song Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-EXPOSURE LITHOGRAPHY EMPLOYING DIFFERENTIALLY SENSITIVE PHOTO...
- Publication number 20120156450
- Publication date Jun 21, 2012
- International Business Machines Corporation
- Wu-Song Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST COMPOSITION FOR NEGATIVE DEVELOPMENT AND PATTERN FORMIN...
- Publication number 20120122031
- Publication date May 17, 2012
- International Business Machines Corporation
- Kuang-Jung Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Novel Integration Process to Improve Focus Leveling Within a Lot Pr...
- Publication number 20120112302
- Publication date May 10, 2012
- International Business Machines Corporation
- Wai-Kin Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST COMPOSITIONS AND METHODS FOR SHRINKING A PHOTORESIST CR...
- Publication number 20120070787
- Publication date Mar 22, 2012
- International Business Machines Corporation
- Wu-Song Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SELF-FORMING TOP ANTI-REFLECTIVE COATING COMPOSITIONS AND, PHOTORES...
- Publication number 20120070782
- Publication date Mar 22, 2012
- International Business Machines Corporation
- Wu-Song Huang
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD OF FORMING SEMICONDUCTOR STRUCTURES WITH CONTACT HOLES
- Publication number 20120028476
- Publication date Feb 2, 2012
- International Business Machines Corporation
- Wai-Kin Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NEAR-INFRARED ABSORPTIVE LAYER-FORMING COMPOSITION AND MULTILAYER FILM
- Publication number 20110262862
- Publication date Oct 27, 2011
- Masaki OHASHI
- G02 - OPTICS
Information Patent Application
NEAR-INFRARED ABSORPTIVE LAYER-FORMING COMPOSITION AND MULTILAYER FILM
- Publication number 20110262863
- Publication date Oct 27, 2011
- Seiichiro Tachibana
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOLITHOGRAPHY FOCUS IMPROVEMENT BY REDUCTION OF AUTOFOCUS RADIAT...
- Publication number 20110256486
- Publication date Oct 20, 2011
- International Business Machines Corporation
- Timothy A. Brunner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Wu-Song Huang

Person

Patents Grantslast 30 patents

Coating compositions suitable for use with an overcoated photoresist

Near-infrared absorbing film compositions

Wet strip process for an antireflective coating layer

Method of forming semiconductor structures with contact holes

Acid-strippable silicon-containing antireflective coating

Dielectric tone inversion materials

Method to mitigate resist pattern critical dimension variation in a...

Dielectric tone inversion materials

Exposure photolithography methods

Near-infrared absorptive layer-forming composition and multilayer film

Developable bottom antireflective coating composition and pattern f...

Developable bottom antireflective coating composition and pattern f...

Silicon-containing antireflective coatings including non-polymeric...

Hybrid photoresist composition and pattern forming method using the...

Hybrid photoresist composition and pattern forming method using the...

Photoresist composition containing a protected hydroxyl group for n...

Photoresist compositions

Silicon containing coating compositions and methods of use

Near-infrared absorbing film compositions

Patterning process

Near-infrared absorptive layer-forming composition and multilayer f...

Developable bottom antireflective coating compositions for negative...

Forming sub-lithographic patterns using double exposure

Near-infrared absorbing film compositions

Multiple exposure photolithography methods

Developable bottom antireflective coating compositions especially s...

Self-forming top anti-reflective coating compositions and, photores...

Method for enhancing lithographic imaging of isolated and semi-isol...

Method of forming a pattern of an array of shapes including a block...

Integration process to improve focus leveling within a lot process...

Patents Applicationslast 30 patents

DIELECTRIC TONE INVERSION MATERIALS

DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND PATTERN F...

EXPOSURE PHOTOLITHOGRAPHY METHODS

WET STRIP PROCESS FOR AN ANTIREFLECTIVE COATING LAYER

SILICON-CONTAINING ANTIREFLECTIVE COATINGS INCLUDING NON-POLYMERIC...

NEAR-INFRARED ABSORBING FILM COMPOSITIONS

ACID-STRIPPABLE SILICON-CONTAINING ANTIREFLECTIVE COATING

PHOTORESIST COMPOSITION CONTAINING A PROTECTED HYDROXYL GROUP FOR N...

HYBRID PHOTORESIST COMPOSITION AND PATTERN FORMING METHOD USING THE...

DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND PATTERN F...

METHOD FOR ENHANCING LITHOGRAPHIC IMAGING OF ISOLATED AND SEMI-ISOL...

PHOTORESIST COMPOSITION CONTAINING A PROTECTED HYDROXYL GROUP FOR N...

PHOTORESIST COMPOSITION FOR NEGATIVE DEVELOPMENT AND PATTERN FORMIN...

NEAR-INFRARED ABSORBING FILM COMPOSITION FOR LITHOGRAPHIC APPLICATION

HYBRID PHOTORESIST COMPOSITION AND PATTERN FORMING METHOD USING THE...

DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR NEGATIVE...

Near-Infrared Absorbing Film Compositions

NEAR-INFRARED ABSORPTIVE LAYER-FORMING COMPOSITION AND MULTILAYER F...

PHOTORESIST COMPOSITIONS

MULTIPLE EXPOSURE PHOTOLITHOGRAPHY METHODS

DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS ESPECIALLY S...

MULTI-EXPOSURE LITHOGRAPHY EMPLOYING DIFFERENTIALLY SENSITIVE PHOTO...

PHOTORESIST COMPOSITION FOR NEGATIVE DEVELOPMENT AND PATTERN FORMIN...

Novel Integration Process to Improve Focus Leveling Within a Lot Pr...

PHOTORESIST COMPOSITIONS AND METHODS FOR SHRINKING A PHOTORESIST CR...

SELF-FORMING TOP ANTI-REFLECTIVE COATING COMPOSITIONS AND, PHOTORES...

METHOD OF FORMING SEMICONDUCTOR STRUCTURES WITH CONTACT HOLES

NEAR-INFRARED ABSORPTIVE LAYER-FORMING COMPOSITION AND MULTILAYER FILM

NEAR-INFRARED ABSORPTIVE LAYER-FORMING COMPOSITION AND MULTILAYER FILM

PHOTOLITHOGRAPHY FOCUS IMPROVEMENT BY REDUCTION OF AUTOFOCUS RADIAT...