Xiafang Zhang

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of determining an asymmetric property of a structure
- Patent number 9,239,522
- Issue date Jan 19, 2016
- KLA-Tencor Corporation
- Meng-Fu Shih
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for determining dielectric layer properties
- Patent number 8,004,290
- Issue date Aug 23, 2011
- KLA-Tencor Corporation
- Xiafang Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Substrate conditioning for corona charge control
- Patent number 7,724,003
- Issue date May 25, 2010
- KLA-Tencor Corporation
- NanChang Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement of effective capacitance
- Patent number 7,525,304
- Issue date Apr 28, 2009
- KLA-Tencor Corporation
- Yiping Feng
- G01 - MEASURING TESTING
Information Patent Grant
Methods for imperfect insulating film electrical thickness/capacita...
- Patent number 7,397,254
- Issue date Jul 8, 2008
- KLA-Tencor Technologies Corp.
- Xiafang (Michelle) Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Corona based charge voltage measurement
- Patent number 7,345,306
- Issue date Mar 18, 2008
- KLA-Tencor Technologies Corporation
- Sergio Edelstein
- G01 - MEASURING TESTING
Information Patent Grant
Corona based charge voltage measurement
- Patent number 7,098,050
- Issue date Aug 29, 2006
- KLA-Tencor Technologies Corporation
- Sergio Edelstein
- G01 - MEASURING TESTING
Information Patent Grant
Methods for imperfect insulating film electrical thickness/capacita...
- Patent number 7,075,318
- Issue date Jul 11, 2006
- KLA-Tencor Technologies Corp.
- Xiafang (Michelle) Zhang
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DETERMINING AN ASYMMETRIC PROPERTY OF A STRUCTURE
- Publication number 20120086940
- Publication date Apr 12, 2012
- Meng-Fu Shih
- G01 - MEASURING TESTING
Information Patent Application
Test Pads, Methods and Systems for Measuring Properties of a Wafer
- Publication number 20070109003
- Publication date May 17, 2007
- KLA-TENCOR TECHNOLOGIES CORP.
- Jianou Shi
- G01 - MEASURING TESTING

Xiafang Zhang

Person

Patents Grantslast 30 patents

Method of determining an asymmetric property of a structure

Method and apparatus for determining dielectric layer properties

Substrate conditioning for corona charge control

Measurement of effective capacitance

Methods for imperfect insulating film electrical thickness/capacita...

Corona based charge voltage measurement

Corona based charge voltage measurement

Methods for imperfect insulating film electrical thickness/capacita...

Patents Applicationslast 30 patents

METHOD OF DETERMINING AN ASYMMETRIC PROPERTY OF A STRUCTURE

Test Pads, Methods and Systems for Measuring Properties of a Wafer