TREA

Xiancan Deng

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  • Santa Clara, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of heating a semiconductor substrate
    • Patent number 6,547,978
    • Issue date Apr 15, 2003
    • Applied Materials Inc.
    • Yan Ye
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Control of patterned etching in semiconductor features
    • Patent number 6,534,416
    • Issue date Mar 18, 2003
    • Applied Materials Inc.
    • Yan Ye
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Copper etch using HCl and HBR chemistry
    • Patent number 6,489,247
    • Issue date Dec 3, 2002
    • Applied Materials, Inc.
    • Yan Ye
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Copper etch using HCI and HBr chemistry
    • Patent number 6,008,140
    • Issue date Dec 28, 1999
    • Applied Materials, Inc.
    • Yan Ye
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Method of heating a semiconductor substrate
    • Publication number 20020045354
    • Publication date Apr 18, 2002
    • Yan Ye
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...