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Xiang Chen
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Singapore, SG
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last 30 patents
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Patent Grant
System and method for substrate transport
Patent number
8,992,153
Issue date
Mar 31, 2015
Intevac, Inc.
Stuart Scollay
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
SYSTEM AND METHOD FOR SUBSTRATE TRANSPORT
Publication number
20090324369
Publication date
Dec 31, 2009
INTEVAC, INC.
Stuart SCOLLAY
H01 - BASIC ELECTRIC ELEMENTS