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XIANG YU YAO
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MILPITAS, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Mixed frequency RF generator coupled to the gas distribution system
Patent number
6,668,752
Issue date
Dec 30, 2003
Applied Materials Inc.
Xiang Yu Yao
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Reducing hydrogen concentration in pecvd amorphous silicon carbide...
Patent number
5,800,878
Issue date
Sep 1, 1998
Applied Materials, Inc.
Xiang Yu Yao
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Patents Applications
last 30 patents
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Patent Application
Forming a semiconductor structure using a combination of planarizin...
Publication number
20040253809
Publication date
Dec 16, 2004
Xiang Yu Yao
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
REDUCING HYDROGEN CONCENTRATION IN PECVD AMORPHOUS SILICON CARBIDE...
Publication number
20030155074
Publication date
Aug 21, 2003
XIANG YU YAO
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...