Xiangang LUO

Person

Chengdu, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Template mark detection method and template position correction met...
- Patent number 12,100,188
- Issue date Sep 24, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask topology optimization method and system for surface plasmon ne...
- Patent number 12,092,960
- Issue date Sep 17, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for inverse optical proximity correction of super-resolution...
- Patent number 12,085,846
- Issue date Sep 10, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for preparing super-resolution lens based on metal-dielectri...
- Patent number 12,085,741
- Issue date Sep 10, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G02 - OPTICS
Information Patent Grant
Near-field lithography immersion system, immersion unit and interfa...
- Patent number 12,078,937
- Issue date Sep 3, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multifunctional lithography device
- Patent number 11,868,055
- Issue date Jan 9, 2024
- The Institute of Optics and Electronics, the Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Visible light-transparent and radiative-cooling multilayer film
- Patent number 11,754,352
- Issue date Sep 12, 2023
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Method for etching curved substrate
- Patent number 11,724,962
- Issue date Aug 15, 2023
- The Institute of Optics and Electronics, the Chinese Academy of Sciences
- Xiangang Luo
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Intelligent correction device control system for super-resolution l...
- Patent number 11,714,358
- Issue date Aug 1, 2023
- The Institute of Optics and Electronics, the Chinese Academy of Sciences
- Xiangang Luo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Secondary imaging optical lithography method and apparatus
- Patent number 11,693,320
- Issue date Jul 4, 2023
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of fabricating micro-nano structure
- Patent number 11,675,273
- Issue date Jun 13, 2023
- The Institute of Optics and Electronics, the Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sub-wavelength structural material having patch type array and comp...
- Patent number 11,592,602
- Issue date Feb 28, 2023
- THE INSTITUTE OF OPTICS AND ELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Xiangang Luo
- F41 - WEAPONS
Information Patent Grant
Methods and apparatuses for coating photoresist
- Patent number 11,061,330
- Issue date Jul 13, 2021
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Super-resolution imaging photolithography
- Patent number 9,958,784
- Issue date May 1, 2018
- THE INSTITUTE OF OPTICS AND ELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHOTORESIST COMPOSITION AND USE THEREOF
- Publication number 20240280901
- Publication date Aug 22, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEAR-FIELD LITHOGRAPHY IMMERSION SYSTEM, IMMERSION UNIT AND INTERFA...
- Publication number 20240272558
- Publication date Aug 15, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPLATE MARK DETECTION METHOD AND TEMPLATE POSITION CORRECTION MET...
- Publication number 20240273853
- Publication date Aug 15, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR PREPARING SUPER-RESOLUTION LENS BASED ON METAL-DIELECTRI...
- Publication number 20240264343
- Publication date Aug 8, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G02 - OPTICS
Information Patent Application
F-P SENSOR PROBE, ABSOLUTE DISTANCE MEASUREMENT DEVICE, AND ABSOLUT...
- Publication number 20240264285
- Publication date Aug 8, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR INVERSE OPTICAL PROXIMITY CORRECTION OF SUPER-RESOLUTION...
- Publication number 20240264521
- Publication date Aug 8, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK TOPOLOGY OPTIMIZATION METHOD AND SYSTEM FOR SURFACE PLASMON NE...
- Publication number 20240264535
- Publication date Aug 8, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOLITHOGRAPHY METHOD
- Publication number 20240264523
- Publication date Aug 8, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION FIELD NON-UNIFORMITY DETECTION SYSTEM, DETECTION METHO...
- Publication number 20240265500
- Publication date Aug 8, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR ETCHING CURVED SUBSTRATE
- Publication number 20230174416
- Publication date Jun 8, 2023
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIFUNCTIONAL LITHOGRAPHY DEVICE
- Publication number 20230129163
- Publication date Apr 27, 2023
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FABRICATING MICRO-NANO STRUCTURE
- Publication number 20230132100
- Publication date Apr 27, 2023
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTELLIGENT CORRECTION DEVICE CONTROL SYSTEM FOR SUPER-RESOLUTION L...
- Publication number 20230126995
- Publication date Apr 27, 2023
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ULTRA-LARGE AREA SCANNING REACTIVE ION ETCHING MACHINE AND ETCHING...
- Publication number 20220068617
- Publication date Mar 3, 2022
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NEGATIVE REFRACTION IMAGING LITHOGRAPHIC METHOD AND EQUIPMENT
- Publication number 20210200079
- Publication date Jul 1, 2021
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VISIBLE LIGHT-TRANSPARENT AND RADIATIVE-COOLING MULTILAYER FILM
- Publication number 20210003354
- Publication date Jan 7, 2021
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SUB-WAVELENGTH STRUCTURAL MATERIAL HAVING COMPATIBILITY OF LOW DETE...
- Publication number 20200249376
- Publication date Aug 6, 2020
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G02 - OPTICS
Information Patent Application
METHODS AND APPARATUSES FOR COATING PHOTORESIST
- Publication number 20200233306
- Publication date Jul 23, 2020
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SECONDARY IMAGING OPTICAL LITHOGRAPHY METHOD AND APPARATUS
- Publication number 20200150538
- Publication date May 14, 2020
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BROADBAND ELECTROMAGNETIC WAVE PHASE MODULATING METHOD AND META SUR...
- Publication number 20190137793
- Publication date May 9, 2019
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G02 - OPTICS
Information Patent Application
SUPER-RESOLUTION IMAGING PHOTOLITHOGRAPHY
- Publication number 20160259253
- Publication date Sep 8, 2016
- Institute of Optics and Electronics, Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Xiangang LUO

Person

Patents Grantslast 30 patents

Template mark detection method and template position correction met...

Mask topology optimization method and system for surface plasmon ne...

Method for inverse optical proximity correction of super-resolution...

Method for preparing super-resolution lens based on metal-dielectri...

Near-field lithography immersion system, immersion unit and interfa...

Multifunctional lithography device

Visible light-transparent and radiative-cooling multilayer film

Method for etching curved substrate

Intelligent correction device control system for super-resolution l...

Secondary imaging optical lithography method and apparatus

Method of fabricating micro-nano structure

Sub-wavelength structural material having patch type array and comp...

Methods and apparatuses for coating photoresist

Super-resolution imaging photolithography

Patents Applicationslast 30 patents

PHOTORESIST COMPOSITION AND USE THEREOF

NEAR-FIELD LITHOGRAPHY IMMERSION SYSTEM, IMMERSION UNIT AND INTERFA...

TEMPLATE MARK DETECTION METHOD AND TEMPLATE POSITION CORRECTION MET...

METHOD FOR PREPARING SUPER-RESOLUTION LENS BASED ON METAL-DIELECTRI...

F-P SENSOR PROBE, ABSOLUTE DISTANCE MEASUREMENT DEVICE, AND ABSOLUT...

METHOD FOR INVERSE OPTICAL PROXIMITY CORRECTION OF SUPER-RESOLUTION...

MASK TOPOLOGY OPTIMIZATION METHOD AND SYSTEM FOR SURFACE PLASMON NE...

PHOTOLITHOGRAPHY METHOD

ILLUMINATION FIELD NON-UNIFORMITY DETECTION SYSTEM, DETECTION METHO...

METHOD FOR ETCHING CURVED SUBSTRATE

MULTIFUNCTIONAL LITHOGRAPHY DEVICE

METHOD OF FABRICATING MICRO-NANO STRUCTURE

INTELLIGENT CORRECTION DEVICE CONTROL SYSTEM FOR SUPER-RESOLUTION L...

ULTRA-LARGE AREA SCANNING REACTIVE ION ETCHING MACHINE AND ETCHING...

NEGATIVE REFRACTION IMAGING LITHOGRAPHIC METHOD AND EQUIPMENT

VISIBLE LIGHT-TRANSPARENT AND RADIATIVE-COOLING MULTILAYER FILM

SUB-WAVELENGTH STRUCTURAL MATERIAL HAVING COMPATIBILITY OF LOW DETE...

METHODS AND APPARATUSES FOR COATING PHOTORESIST

SECONDARY IMAGING OPTICAL LITHOGRAPHY METHOD AND APPARATUS

BROADBAND ELECTROMAGNETIC WAVE PHASE MODULATING METHOD AND META SUR...

SUPER-RESOLUTION IMAGING PHOTOLITHOGRAPHY